发明申请
- 专利标题: Vertical cavity surface emitting laser and method of manufacturing it
- 专利标题(中): 垂直腔表面发射激光器及其制造方法
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申请号: US12076791申请日: 2008-03-24
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公开(公告)号: US20080240194A1公开(公告)日: 2008-10-02
- 发明人: Osamu Maeda , Masaki Shiozaki , Norihiko Yamaguchi , Yoshinori Yamauchi , Takahiro Arakida
- 申请人: Osamu Maeda , Masaki Shiozaki , Norihiko Yamaguchi , Yoshinori Yamauchi , Takahiro Arakida
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-081153 20070327
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; H01L33/00
摘要:
A VSCEL capable of being easily and inexpensively manufactured and of stabilizing the polarization direction of laser light in one direction is provided. The Vertical Cavity Surface Emitting Laser includes a semiconductor lamination structure including a first multilayer film reflector, an active layer having a light emitting region, and a second multilayer film reflector in this order over a substrate from the substrate side. The semiconductor lamination structure has a pair of grooves provided with a region opposed to the light emitting region in between, and one or a plurality of first oxidation layers including a first non-oxidation region provided at least in a region opposed to the light emitting region and a first oxidation region provided on each side face of the pair of grooves.