发明申请
- 专利标题: Method of fabricating non-volatile memory device
- 专利标题(中): 制造非易失性存储器件的方法
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申请号: US11978567申请日: 2007-10-30
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公开(公告)号: US20080242011A1公开(公告)日: 2008-10-02
- 发明人: Seung-hwan Song , Yoon-dong Park , June-mo Koo , Suk-pil Kim , Jae-woong Hyun , Choong-ho Lee , Tae-hun Kim
- 申请人: Seung-hwan Song , Yoon-dong Park , June-mo Koo , Suk-pil Kim , Jae-woong Hyun , Choong-ho Lee , Tae-hun Kim
- 专利权人: SAMSUNG ELECTRONICS CO., LTD
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD
- 优先权: KR10-2007-0030033 20070327
- 主分类号: H01L21/84
- IPC分类号: H01L21/84
摘要:
A method of fabricating a non-volatile memory device according to example embodiments may include forming a semiconductor layer on a substrate. A plurality of lower charge storing layers may be formed on a bottom surface of the semiconductor layer. A plurality of lower control gate electrodes may be formed on the plurality of lower charge storing layers. A plurality of upper charge storing layers may be formed on a top surface of the semiconductor layer. A plurality of upper control gate electrodes may be formed on the plurality of upper charge storing layers, wherein the plurality of lower and upper control gate electrodes may be arranged alternately.
公开/授权文献
- US07585755B2 Method of fabricating non-volatile memory device 公开/授权日:2009-09-08
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