发明申请
- 专利标题: Vibratory Gyrosensor
- 专利标题(中): 振动陀螺仪
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申请号: US10599833申请日: 2006-02-23
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公开(公告)号: US20080257044A1公开(公告)日: 2008-10-23
- 发明人: Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
- 申请人: Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
- 优先权: JP2005-047802 20050223; JP2005-050962 20050225; JP2005-066051 20050309; JP2005-374325 20051227
- 国际申请: PCT/JP2006/030333 WO 20060223
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
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