发明申请
- 专利标题： WAFER SUPPORTER
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申请号： US11874184申请日： 2007-10-17
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公开(公告)号： US20080277313A1公开(公告)日： 2008-11-13
- 发明人: Ta-Yung Sung , Kuo-Hsin Chen , Chi-Tsai Chiang
- 申请人： Ta-Yung Sung , Kuo-Hsin Chen , Chi-Tsai Chiang
- 优先权： TW096116673 20070510
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; B65D85/86
摘要：
A wafer supporter includes a base and a plurality of rods vertically fixed on the base. Each rod includes holders to support a wafer. Each of the holders has a downwardly slanted top surface relative to the corresponding rod for a pre-determined angle so that the wafer lies on the top surface on its rim.
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IPC分类:
