发明申请
- 专利标题： METHOD AND APPARATUS FOR CONTROL OF A POSITIONING DEVICE
- 专利标题（中）： 用于控制定位装置的方法和装置
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申请号： US12111222申请日： 2008-04-29
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公开(公告)号： US20080284457A1公开(公告)日： 2008-11-20
- 发明人: Ulf HACKIUS , Frank FEHRMANN , Juliane BUSCH , Ralf KELLER
- 申请人： Ulf HACKIUS , Frank FEHRMANN , Juliane BUSCH , Ralf KELLER
- 申请人地址： DE Thiendorf OT Sacka
- 专利权人： SUSS MicroTec Test Systems GmbH
- 当前专利权人： SUSS MicroTec Test Systems GmbH
- 当前专利权人地址： DE Thiendorf OT Sacka
- 优先权： DE102007020643.9 20070430
- 主分类号： G01R31/26
- IPC分类号： G01R31/26 ; H01L21/67
摘要：
In a device and a method for positioning an object, a drive of a movement device is controlled. To this end, a visual joystick is actuated, as a result of which a moveable actuator is moved, at least linearly by means of a display of a control unit of the movement device, into a position, in which a direction of movement, which can be implemented with the drive, is displayed symbolically. The drive for the movement of the object in the displayed direction of movement is initiated by means of a switching function of the actuator.
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