发明申请
- 专利标题： PIEZOELECTRIC THIN-FILM RESONATOR AND FILTER
- 专利标题（中）： 压电薄膜谐振器和滤波器
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申请号： US12122246申请日： 2008-05-16
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公开(公告)号： US20080284543A1公开(公告)日： 2008-11-20
- 发明人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
- 申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
- 申请人地址： JP Yokohama-shi JP Kawasaki-shi
- 专利权人： FUJITSU MEDIA DEVICES LIMITED,FUJITSU LIMITED
- 当前专利权人： FUJITSU MEDIA DEVICES LIMITED,FUJITSU LIMITED
- 当前专利权人地址： JP Yokohama-shi JP Kawasaki-shi
- 优先权： JP2007-131094 20070517
- 主分类号： H03H9/54
- IPC分类号： H03H9/54 ; H01L41/047
摘要：
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
公开/授权文献
- US07737806B2 Piezoelectric thin-film resonator and filter 公开/授权日：2010-06-15