发明申请
- 专利标题: GROWTH METHOD OF GaN CRYSTAL, AND GaN CRYSTAL SUBSTRATE
- 专利标题(中): GaN晶体和GaN晶体衬底的生长方法
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申请号: US12130082申请日: 2008-05-30
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公开(公告)号: US20080296585A1公开(公告)日: 2008-12-04
- 发明人: Naoki MATSUMOTO , Fumitaka Sato , Seiji Nakahata , Takuji Okahisa , Koji Uematsu
- 申请人: Naoki MATSUMOTO , Fumitaka Sato , Seiji Nakahata , Takuji Okahisa , Koji Uematsu
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 优先权: JP2007-147095 20070601
- 主分类号: H01L29/207
- IPC分类号: H01L29/207 ; H01L21/205
摘要:
A method of producing a GaN crystal is directed to growing a GaN crystal on a GaN seed crystal substrate. The method includes the steps of preparing a GaN seed crystal substrate including a first dopant such that the thermal expansion coefficient of the GaN seed crystal substrate becomes greater than that of the GaN crystal, and growing the GaN crystal to a thickness of at least 1 mm on the GaN seed crystal substrate. Accordingly, there can be provided a method of producing a GaN crystal that can suppress generation of a crack and grow a thick GaN crystal, and a GaN crystal substrate.
公开/授权文献
- US07723142B2 Growth method of GaN crystal, and GaN crystal substrate 公开/授权日:2010-05-25
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