发明申请
US20080304943A1 SUBSTRATE CARRIER AND FACILITY INTERFACE AND APPARATUS INCLUDING SAME
有权
基板载体和设备接口以及包括其中的设备
- 专利标题： SUBSTRATE CARRIER AND FACILITY INTERFACE AND APPARATUS INCLUDING SAME
- 专利标题（中）： 基板载体和设备接口以及包括其中的设备
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申请号： US12177598申请日： 2008-07-22
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公开(公告)号： US20080304943A1公开(公告)日： 2008-12-11
- 发明人: Chen-Hua Yu , Yi-Li Hsiao
- 申请人： Chen-Hua Yu , Yi-Li Hsiao
- 申请人地址： TW Hsin-Chu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址： TW Hsin-Chu
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.
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