Methods for stud bump formation and apparatus for performing the same
    4.
    发明授权
    Methods for stud bump formation and apparatus for performing the same 有权
    螺栓凸块形成方法及其执行方法

    公开(公告)号:US08540136B1

    公开(公告)日:2013-09-24

    申请号:US13605403

    申请日:2012-09-06

    IPC分类号: B23K31/02 B23K37/00

    摘要: Methods for forming stud bumps and apparatuses for forming stud bumps are disclosed. According to an embodiment, a method includes clamping a wire with a clamp. The clamp includes at least two opposing plates, and at least one of the opposing plates includes a protruding feature that intersects the wire when the wire is clamped forming a first notch in the wire. The method further includes bonding the wire to a bonding surface, releasing the wire from the clamp, passing the wire a notch pitch distance through the clamp, clamping the wire with the clamp forming a second notch in the wire, and breaking the wire leaving a bonded portion of the wire on the bonding surface. The second notch is the notch pitch distance from the first notch along the wire.

    摘要翻译: 公开了用于形成柱形凸块的方法和用于形成凸块凸块的装置。 根据实施例,一种方法包括用夹具夹紧线。 所述夹具包括至少两个相对的板,并且当所述线被夹紧形成所述线中的第一凹口时,所述相对板中的至少一个包括与所述线相交的突出特征。 该方法还包括将线接合到接合表面,将线从夹具中释放出来,使线穿过钳口的间距距离通过夹具夹紧线,夹具在线中形成第二凹口,并将线断开, 接合表面上的导线的接合部分。 第二个凹口是距离第一个凹口沿导线的切口间距距离。

    PVD target with end of service life detection capability
    5.
    发明授权
    PVD target with end of service life detection capability 有权
    PVD目标,具有使用寿命检测功能

    公开(公告)号:US08276648B2

    公开(公告)日:2012-10-02

    申请号:US13356950

    申请日:2012-01-24

    IPC分类号: B22D11/00

    摘要: A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.

    摘要翻译: 一种用于形成用于在PVD靶减少到预定量的PVD靶材料时进行信号传导的基于管的检测器的方法包括提供具有内部模制构件的模具构件和在其间限定空间的外部模制构件,熔化所需的管 材料,将熔融管材注入内部模制件和外部模制件之间的空间中,冷却熔融管材料,在熔融管材冷却并固化成管之后,从模具构件中取出管子,将管子 在物理气相沉积靶中,其中管形成基于管的检测器的外壳。

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    6.
    发明申请
    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY 有权
    PVD目标终止服务生命检测能力

    公开(公告)号:US20120131784A1

    公开(公告)日:2012-05-31

    申请号:US13356950

    申请日:2012-01-24

    IPC分类号: B23P11/00

    摘要: A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.

    摘要翻译: 一种用于形成用于在PVD靶减少到预定量的PVD靶材料时进行信号传导的基于管的检测器的方法包括提供具有内部模制构件的模具构件和在其间限定空间的外部模制构件,熔化所需的管 材料,将熔融管材注入内部模制件和外部模制件之间的空间中,冷却熔融管材料,在熔融管材冷却并固化成管之后,从模具构件中取出管子,将管子 在物理气相沉积靶中,其中管形成基于管的检测器的外壳。

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    7.
    发明申请
    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY 审中-公开
    PVD目标终止服务生命检测能力

    公开(公告)号:US20110126397A1

    公开(公告)日:2011-06-02

    申请号:US13022221

    申请日:2011-02-07

    IPC分类号: B23P11/00 B29C41/42 B29C41/02

    摘要: A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.

    摘要翻译: 用于物理气相沉积的PVD靶结构。 PVD目标结构包括源材料的可消耗板和一个或多个检测器,用于指示源材料的板块何时接近或已经被减少到表示目标结构的使用寿命端点的给定量。 每个检测器包括可以通过在散装材料中形成多个孔并将散装材料分离成多个分立的包围单元而构成的外壳,每个孔包括孔中的一个。 或者,检测器的外壳可以使用具有一个或多个模具构件的模具和挤出,铸造,电化学镀和/或片材成型方法来制造。

    Substrate carrier and facility interface and apparatus including same
    9.
    发明授权
    Substrate carrier and facility interface and apparatus including same 有权
    基板载体和设备接口及其设备

    公开(公告)号:US07918251B2

    公开(公告)日:2011-04-05

    申请号:US12177598

    申请日:2008-07-22

    IPC分类号: B65B1/04

    摘要: A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

    摘要翻译: 载体包括外壳,机壳和至少一个基板保持器。 外壳包括一个门。 机柜耦合到载体。 所述柜包括至少一个阀并且包含至少一个还原流体。 衬底保持器设置在外壳内以支撑至少一个衬底。

    PVD target with end of service life detection capability
    10.
    发明授权
    PVD target with end of service life detection capability 有权
    PVD目标,具有使用寿命检测功能

    公开(公告)号:US07891536B2

    公开(公告)日:2011-02-22

    申请号:US11427618

    申请日:2006-06-29

    IPC分类号: B21D39/00

    摘要: A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.

    摘要翻译: 用于物理气相沉积的PVD靶结构。 PVD目标结构包括源材料的可消耗板和一个或多个检测器,用于指示源材料的板块何时接近或已经被减少到表示目标结构的使用寿命端点的给定量。 每个检测器包括可以通过在散装材料中形成多个孔并将散装材料分离成多个分立的包围单元而构成的外壳,每个孔包括孔中的一个。 或者,检测器的外壳可以使用具有一个或多个模具构件的模具和挤出,铸造,电化学镀和/或片材成型方法来制造。