发明申请
US20080315099A1 DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER 有权
具有双材料传感器的红外辐射探测器

DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER
摘要:
A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.
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