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    Detector of infrared radiation having a bi-material transducer
    2.
    发明授权
    Detector of infrared radiation having a bi-material transducer 有权
    红外辐射检测器具有双材料传感器

    公开(公告)号：US07580175B2

    公开(公告)日：2009-08-25

    申请号：US11766414

    申请日：2007-06-21

    申请人： Vladimir Anatolyevich Aksyuk ,  Cristian A. Bolle ,  Christopher D. W. Jones ,  Flavio Pardo ,  Roland Ryf ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Cristian A. Bolle ,  Christopher D. W. Jones ,  Flavio Pardo ,  Roland Ryf ,  Maria Elina Simon

    IPC分类号： G02B26/00 ,  G01J5/00

    CPC分类号： G01J5/40

    摘要： A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.

    摘要翻译： 本发明的代表性实施例提供一种红外（IR）检测器，其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差，悬架臂变形并改变板的偏移距离。 在一个实施例中，悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行，其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER
    3.
    发明申请
    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER 有权
    具有双材料传感器的红外辐射探测器

    公开(公告)号：US20080315099A1

    公开(公告)日：2008-12-25

    申请号：US11766414

    申请日：2007-06-21

    申请人： Vladimir Anatolyevich Aksyuk ,  Cristian A. Bolle ,  Christopher D. W. Jones ,  Flavio Pardo ,  Roland Ryf ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Cristian A. Bolle ,  Christopher D. W. Jones ,  Flavio Pardo ,  Roland Ryf ,  Maria Elina Simon

    IPC分类号： G01J5/00

    CPC分类号： G01J5/40

    摘要： A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.

    摘要翻译： 本发明的代表性实施例提供一种红外（IR）检测器，其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差，悬架臂变形并改变板的偏移距离。 在一个实施例中，悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行，其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

    Robust MEMS actuator for relays
    6.
    发明授权
    Robust MEMS actuator for relays 失效
    用于继电器的强大的MEMS执行器

    公开(公告)号：US07471184B1

    公开(公告)日：2008-12-30

    申请号：US11866154

    申请日：2007-10-02

    申请人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC分类号： H01H61/01 ,  H01L23/58 ,  H01L31/04 ,  H01L21/00

    CPC分类号： B81B3/0072 ,  B81B2201/032 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

    摘要： An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.

    摘要翻译： 一种包括微机电系统（MEMS）装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。 结构元件具有包括第一部分和第二部分的梁。 第一部分连接到锚固垫和第二部分。 第二部分可相对于基板移动并由导电材料制成。 另外，以下条件中的至少一个成立：第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。

    MEMS actuator
    7.
    发明授权
    MEMS actuator 有权
    MEMS致动器

    公开(公告)号：US07733200B2

    公开(公告)日：2010-06-08

    申请号：US11904949

    申请日：2007-09-29

    申请人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC分类号： H01H51/22

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    摘要翻译： 包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

    THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH
    10.
    发明申请
    THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH 有权
    用于基于MEMS的继电器开关的热致动器

    公开(公告)号：US20090040008A1

    公开(公告)日：2009-02-12

    申请号：US11836860

    申请日：2007-08-10

    申请人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC分类号： H01H37/52

    CPC分类号： H01H61/02 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H2061/008

    摘要： A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.

    摘要翻译： 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有（i）热膨胀层和（ii）与热膨胀层电隔离的电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀，从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制，可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。