发明申请
US20080315289A1 ELECTRICALLY ERASABLE PROGRAMMABLE READ-ONLY MEMORY (EEPROM) DEVICE AND METHODS OF FABRICATING THE SAME
失效
电可擦除可编程只读存储器(EEPROM)器件及其制造方法
- 专利标题: ELECTRICALLY ERASABLE PROGRAMMABLE READ-ONLY MEMORY (EEPROM) DEVICE AND METHODS OF FABRICATING THE SAME
- 专利标题(中): 电可擦除可编程只读存储器(EEPROM)器件及其制造方法
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申请号: US12199307申请日: 2008-08-27
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公开(公告)号: US20080315289A1公开(公告)日: 2008-12-25
- 发明人: JAE HWANG KIM , SEUNG-BEOM YOON , KWANG-WOOK KOH , CHANG-HUN LEE , SUNG-HO KIM , SUNG-CHUL PARK , JU-RI KIM
- 申请人: JAE HWANG KIM , SEUNG-BEOM YOON , KWANG-WOOK KOH , CHANG-HUN LEE , SUNG-HO KIM , SUNG-CHUL PARK , JU-RI KIM
- 优先权: KR2004-81861 20041013
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
An EEPROM device includes a device isolation layer disposed at a predetermined region of a semiconductor substrate to define active regions, a pair of control gates crossing the device isolation layers and an active region, a pair of selection gates interposed between the control gates to cross the device isolation layers and the active region and a floating gate and an intergate dielectric pattern stacked sequentially between the control gates and the active region The EEPROM device further includes a gate insulation layer of a memory transistor interposed between the floating gate and the active region and a tunnel insulation layer thinner than the gate insulation layer of the memory transistor and a gate insulation layer of a selection transistor interposed between the selection gates and the active region. The tunnel insulation layer is aligned at one side adjacent to the floating gate.
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