发明申请
US20080315320A1 Semiconductor Device with both I/O and Core Components and Method of Fabricating Same
有权
具有I / O和核心组件的半导体器件及其制造方法
- 专利标题: Semiconductor Device with both I/O and Core Components and Method of Fabricating Same
- 专利标题(中): 具有I / O和核心组件的半导体器件及其制造方法
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申请号: US11766425申请日: 2007-06-21
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公开(公告)号: US20080315320A1公开(公告)日: 2008-12-25
- 发明人: Chung Long Cheng , Sheng-Chen Chung , Kong-Beng Thei , Harry Chuang , Mong Song Liang
- 申请人: Chung Long Cheng , Sheng-Chen Chung , Kong-Beng Thei , Harry Chuang , Mong Song Liang
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L27/12 ; H01L27/01 ; H01L31/0392
摘要:
A semiconductor device having a core device with a high-k gate dielectric and an I/O device with a silicon dioxide or other non-high-k gate dielectric, and a method of fabricating such a device. A core well and an I/O well are created in a semiconductor substrate and separated by an isolation structure. An I/O device is formed over the I/O well and has a silicon dioxide or a low-k gate dielectric. A resistor may be formed on an isolation structure adjacent to the core well. A core-well device such as a transistor is formed over the core well, and has a high-k gate dielectric. In some embodiments, a p-type I/O well and an n-type I/O well are created. In a preferred embodiment, the I/O device or devices are formed prior to forming the core device and protected with a sacrificial layer until the core device is fabricated.
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