发明申请
US20080315326A1 Method for forming an integrated circuit having an active semiconductor device and integrated circuit
审中-公开
用于形成具有有源半导体器件和集成电路的集成电路的方法
- 专利标题: Method for forming an integrated circuit having an active semiconductor device and integrated circuit
- 专利标题(中): 用于形成具有有源半导体器件和集成电路的集成电路的方法
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申请号: US11821274申请日: 2007-06-21
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公开(公告)号: US20080315326A1公开(公告)日: 2008-12-25
- 发明人: Werner Graf , Ines Uhlig , Daniel Koehler , Joerg Radecker , Lars Heineck
- 申请人: Werner Graf , Ines Uhlig , Daniel Koehler , Joerg Radecker , Lars Heineck
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8239
摘要:
An integrated circuit having an active semiconductor device is formed comprising a trench defined by conductor lines previously formed.
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IPC分类: