发明申请
- 专利标题： Coordinate measuring machine and method for calibrating the coordinate measuring machine
- 专利标题（中）： 坐标测量机和校准坐标测量机的方法
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申请号： US12215115申请日： 2008-06-25
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公开(公告)号： US20090002486A1公开(公告)日： 2009-01-01
- 发明人: Wolfgang Fricke , Klaus Rinn , Slawomir Czerkas
- 申请人： Wolfgang Fricke , Klaus Rinn , Slawomir Czerkas
- 申请人地址： DE Weilburg
- 专利权人： VISTEC Semiconductor Systems GmbH
- 当前专利权人： VISTEC Semiconductor Systems GmbH
- 当前专利权人地址： DE Weilburg
- 优先权： DE102007030390.6 20070629
- 主分类号： H04N7/18
- IPC分类号： H04N7/18
摘要：
A coordinate measuring machine is disclosed having an orientor automatically orienting a substrate associated therewith. A control and computing unit is further associated with the coordinate measuring machine, so that self-calibration may be performed on the basis of at least two different and automatically set orientations of the substrate.
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