发明申请
- 专利标题： FLIPPING STAGE ARRANGEMENT FOR REDUCED WAFER CONTAMINATION CROSS SECTION AND IMPROVED MEASUREMENT ACCURACY AND THROUGHPUT
- 专利标题（中）： 减少波浪污染的转运阶段安排交叉部分和改进的测量精度和通过率
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申请号： US11772838申请日： 2007-07-03
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公开(公告)号： US20090009763A1公开(公告)日： 2009-01-08
- 发明人: Shahin Zangooie , Lin Zhou , Roger M. Young , Clemente Bottini , Robert J. Foster , Ronald D. Fiege
- 申请人： Shahin Zangooie , Lin Zhou , Roger M. Young , Clemente Bottini , Robert J. Foster , Ronald D. Fiege
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： G01J3/45
- IPC分类号： G01J3/45 ; G01B11/14 ; G01B11/30
摘要：
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample section with relation to the optical metrology system. A method and a computer program product are provided.
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