Invention Application
US20090014710A1 NONVOLATILE MEMORY ELEMENT, NONVOLATILE MEMORY APPARATUS, AND METHOD OF MANUFACTURE THEREOF
有权
非易失性存储元件,非易失性存储器件及其制造方法
- Patent Title: NONVOLATILE MEMORY ELEMENT, NONVOLATILE MEMORY APPARATUS, AND METHOD OF MANUFACTURE THEREOF
- Patent Title (中): 非易失性存储元件,非易失性存储器件及其制造方法
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Application No.: US12281034Application Date: 2007-03-06
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Publication No.: US20090014710A1Publication Date: 2009-01-15
- Inventor: Yoshio Kawashima , Takeshi Takagi , Takumi Mikawa , Zhiqiang Wei
- Applicant: Yoshio Kawashima , Takeshi Takagi , Takumi Mikawa , Zhiqiang Wei
- Priority: JP2006-062316 20060308
- International Application: PCT/JP2007/054277 WO 20070306
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A lower electrode layer 2, an upper electrode layer 4 formed above the lower electrode layer 2, and a metal oxide thin film layer 3 formed between the lower electrode layer 2 and the upper electrode layer 4 are provided. The metal oxide thin film layer 3 includes a first region 3a whose value of resistance increases or decreases by an electric pulse that is applied between the lower electrode layer 2 and the upper electrode layer 4 and a second region 3b arranged around the first region 3a and having a larger content of oxygen than the first region 3a, wherein the lower and upper electrode layers 2 and 4 and at least a part of the first region 3a are arranged so as to overlap as viewed from the direction of the thickness of the first region 3a.
Public/Granted literature
- US07692178B2 Nonvolatile memory element, nonvolatile memory apparatus, and method of manufacture thereof Public/Granted day:2010-04-06
Information query
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