- 专利标题: Disposable organic spacers
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申请号: US11825953申请日: 2007-07-10
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公开(公告)号: US20090017587A1公开(公告)日: 2009-01-15
- 发明人: Paul A. Grudowski , Kurt H. Junker , Thomas J. Kropewnicki , Andrew G. Nagy
- 申请人: Paul A. Grudowski , Kurt H. Junker , Thomas J. Kropewnicki , Andrew G. Nagy
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
A method for making a semiconductor device is provided, comprising (a) providing a semiconductor structure comprising a first gate electrode (210); (b) forming a first set of organic spacers (213) adjacent to said first electrode; (c) depositing a first photo mask (215) over the structure; and (d) simultaneously removing the first set of organic spacers and the first photo mask.
公开/授权文献
- US07579228B2 Disposable organic spacers 公开/授权日:2009-08-25