Invention Application
- Patent Title: MICROWAVE PLASMA EXCITERS
- Patent Title (中): MICROWAVE等离子体EXCITERS
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Application No.: US11766875Application Date: 2007-06-22
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Publication No.: US20090020009A1Publication Date: 2009-01-22
- Inventor: Zenon ZAKRZEWSKI , Dariusz CZYLKOWSKI , Mariusz JASINSKI , Michel MOISAN , Daniel GUERIN , Christian LARQUET , Jean-Christophe ROSTAING
- Applicant: Zenon ZAKRZEWSKI , Dariusz CZYLKOWSKI , Mariusz JASINSKI , Michel MOISAN , Daniel GUERIN , Christian LARQUET , Jean-Christophe ROSTAING
- Priority: FRPCT/FR2005/051136 20050622
- Main IPC: B03C3/38
- IPC: B03C3/38 ; H05H1/46
Abstract:
The invention relates to a microwave plasma exciter device comprising: a waveguide containing means (23) for concentrating the microwaves; and means (110, 120) for forming a plasma, which are disposed in a microwave concentration zone.
Public/Granted literature
- US07799119B2 Microwave plasma exciters Public/Granted day:2010-09-21
Information query
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