发明申请
US20090020158A1 Method for manufacturing solar cell and solar cell, and method for manufacturing semiconductor device
审中-公开
太阳能电池和太阳能电池的制造方法以及半导体装置的制造方法
- 专利标题: Method for manufacturing solar cell and solar cell, and method for manufacturing semiconductor device
- 专利标题(中): 太阳能电池和太阳能电池的制造方法以及半导体装置的制造方法
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申请号: US11918719申请日: 2006-04-11
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公开(公告)号: US20090020158A1公开(公告)日: 2009-01-22
- 发明人: Hiroyuki Ohtsuka , Masatoshi Takahashi , Naoki Ishikawa , Shigenori Saisu , Toyohiro Ueguri , Satoyuki Ojima , Takenori Watabe , Takeshi Akatsuka , Tsutomu Onishi
- 申请人: Hiroyuki Ohtsuka , Masatoshi Takahashi , Naoki Ishikawa , Shigenori Saisu , Toyohiro Ueguri , Satoyuki Ojima , Takenori Watabe , Takeshi Akatsuka , Tsutomu Onishi
- 申请人地址: JP TOKYO JP JYOETSU-SHI JP TOKYO
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.,NAOETSU ELECTRONICS CO., LTD.,SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.,NAOETSU ELECTRONICS CO., LTD.,SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP TOKYO JP JYOETSU-SHI JP TOKYO
- 优先权: JP2005-127950 20050426
- 国际申请: PCT/JP2006/307595 WO 20060411
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; H01L21/22 ; B32B9/00
摘要:
The present invention is a method for manufacturing a solar cell by forming a p-n junction in a semiconductor substrate having a first conductivity type, wherein, at least: a first coating material containing a dopant and an agent for preventing a dopant from scattering, and a second coating material containing a dopant, are coated on the semiconductor substrate having the first conductivity type so that the second coating material may be brought into contact with at least the first coating material; and, a first diffusion layer formed by coating the first coating material, and a second diffusion layer formed by coating the second coating material the second diffusion layer having a conductivity is lower than that of the first diffusion layer are simultaneously formed by a diffusion heat treatment; a solar cell manufactured by the method; and a method for manufacturing a semiconductor device. It is therefore possible to provide the method for manufacturing the solar cell, which can manufacture the solar cell whose photoelectric conversion efficiency is improved at low cost and with a simple and easy method by suppressing surface recombination in a portion other than an electrode of a light-receiving surface and recombination within an emitter while obtaining ohmic contact; the solar cell manufactured by the method; and the method for manufacturing the semiconductor device.