Invention Application
- Patent Title: ELECTROMAGNETIC RADIATION DETECTOR AND METHOD FOR MANUFACTURING SUCH A DETECTOR
- Patent Title (中): 电磁辐射探测器及其制造方法
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Application No.: US12170669Application Date: 2008-07-10
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Publication No.: US20090020702A1Publication Date: 2009-01-22
- Inventor: Michel VILAIN
- Applicant: Michel VILAIN
- Applicant Address: FR Veurey Voroize
- Assignee: ULIS
- Current Assignee: ULIS
- Current Assignee Address: FR Veurey Voroize
- Priority: FR07.05271 20070720
- Main IPC: G01J5/02
- IPC: G01J5/02 ; H01L31/18

Abstract:
This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.
Public/Granted literature
- US07999227B2 Electromagnetic radiation detector and method for manufacturing such a detector Public/Granted day:2011-08-16
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