公开(公告)号：US20080067389A1

公开(公告)日：2008-03-20

申请号：US11842435

申请日：2007-08-21

Applicant: Michel VILAIN

Inventor： Michel VILAIN

IPC: G01J5/00

CPC classification number: G01J5/10 ,  G01J5/02 ,  G01J5/023 ,  G01J5/024 ,  G01J5/20

Abstract: This electronic detection device comprises a substrate and at least one microstructure, said microstructure comprising a membrane which extends substantially facing and at a distance from said substrate, said membrane being mechanically attached and electrically connected to at least one longilineal retention element which is mechanically and electrically connected to said substrate via at least one post. The device also comprises at least one stiffener element extending over at least one of the main faces of said microstructure.

Abstract translation: 该电子检测装置包括基底和至少一个微结构，所述微结构包括基本上面对并距离所述基底一定距离延伸的膜，所述膜机械连接并电连接至至少一个机械和电气的直线保持元件 经由至少一个柱连接到所述衬底。 该装置还包括至少一个在所述微结构的至少一个主面上延伸的加强件。

公开(公告)号：US20090266986A1

公开(公告)日：2009-10-29

申请号：US12398427

申请日：2009-03-05

Applicant: Michel VILAIN

Inventor： Michel VILAIN

IPC: G01J5/00

CPC classification number: G01J5/02 ,  G01J5/023 ,  G01J5/20

Abstract: A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.

Abstract translation: 用于检测电磁辐射的检测器包括基底和至少一个微结构，包括基本相反并远离基底延伸的辐射敏感膜。 膜被机械连接到至少两个长线，共线保持元件，其中至少一个通过中间柱机械地连接到基底。 膜与衬底电连续。 至少两根共线腿在其端部的水平处彼此附接，该端部通过与腿和膜基本共面的机械连接器附接到膜。 腿中的至少一个腿的另一端与刚性横梁成一体，该刚性横梁基本上与腿部共面并相对于腿的主要尺寸基本上成直角延伸。 横梁与与基板成一体的柱是一体的。

公开(公告)号：US20090020702A1

公开(公告)日：2009-01-22

申请号：US12170669

申请日：2008-07-10

Applicant: Michel VILAIN

Inventor： Michel VILAIN

IPC: G01J5/02 ,  H01L31/18

CPC classification number: G01J5/20 ,  H01L27/14649

Abstract: This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.

Abstract translation: 该电磁辐射检测器包括反射基板和至少一个检测元件，该检测元件包括对所述辐射敏感并悬浮在基底上方的膜。 膜与至少一个检测元件和基底之间的距离是可变的，所述距离具有预定的空间分布，其适合于使至少一个预定波长范围内的辐射检测器的响应的快速变化最小化。