发明申请
- 专利标题: SOLID-STATE IMAGING DEVICE, SOLID-STATE IMAGING APPARATUS AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 固态成像装置,固态成像装置及其制造方法
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申请号: US12189971申请日: 2008-08-12
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公开(公告)号: US20090020840A1公开(公告)日: 2009-01-22
- 发明人: Kimiaki TOSHIKIYO , Takanori YOGO , Motonori ISHII , Toshinobu MATSUNO , Kazutoshi ONOZAWA
- 申请人: Kimiaki TOSHIKIYO , Takanori YOGO , Motonori ISHII , Toshinobu MATSUNO , Kazutoshi ONOZAWA
- 申请人地址: JP Osaka
- 专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: JP Osaka
- 优先权: JP2005-178585 20050617
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
A solid-state imaging apparatus includes a plurality of unit pixels with associated microlenses arranged in a two-dimensional array. Each microlens includes a distributed index lens with a modulated effective refractive index distribution obtained by including a combination of a plurality of patterns having a concentric structure, the plurality of patterns being divided into line widths equal to or shorter than a wavelength of an incident light. At least one of the plurality of patterns includes a lower light-transmitting film having the concentric structure and a first line width and a first film thickness, and an upper light-transmitting film having the concentric structure configured on the lower light-transmitting film having a second line width and a second film thickness. The distributed index lens has a structure in which a refractive index material is dense at a center and becomes sparse gradually toward an outer side in the concentric structure.