发明申请
- 专利标题: SEMICONDUCTOR DEVICE
- 专利标题(中): 半导体器件
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申请号: US12176606申请日: 2008-07-21
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公开(公告)号: US20090039336A1公开(公告)日: 2009-02-12
- 发明人: Motoyasu Terao , Yoshitaka Sasago , Kenzo Kurotsuchi , Kazuo Ono , Yoshihisa Fujisaki , Norikatsu Takaura , Riichiro Takemura
- 申请人: Motoyasu Terao , Yoshitaka Sasago , Kenzo Kurotsuchi , Kazuo Ono , Yoshihisa Fujisaki , Norikatsu Takaura , Riichiro Takemura
- 专利权人: HITACHI, LTD.
- 当前专利权人: HITACHI, LTD.
- 优先权: JPJP2007-206890 20070808
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
The performance of a semiconductor device capable of storing information is improved. A memory layer of a memory element is formed by a first layer at a bottom electrode side and a second layer at a top electrode side. The first layer contains 20-70 atom % of at least one element of a first element group of Cu, Ag, Au, Al, Zn, and Cd, contains 3-40 atom % of at least one element of a second element group of V, Nb, Ta, Cr, Mo, W, Ti, Zr, Hf, Fe, Co, Ni, Pt, Pd, Rh, Ir, Ru, Os, and lanthanoid elements, and contains 20-60 atom % of at least one element of a third element group of S, Se, and Te. The second layer contains 5-50 atom % of at least one element of the first element group, 10-50 atom % of at least one element of the second element group, and 30-70 atom % of oxygen.
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