发明申请
- 专利标题： DEFORMABLE MIRROR DEVICE AND APPARATUS FOR OBSERVING RETINA OF EYE USING THE SAME
- 专利标题（中）： 用于观察眼睛的眼睛的可变形镜子装置和装置
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申请号： US12188018申请日： 2008-08-07
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公开(公告)号： US20090051874A1公开(公告)日： 2009-02-26
- 发明人: Kei Masunishi , Akihiro Koga , Ryo Furukawa , Osamu Nishimura , Akio Kobayashi , Hiroyuki Kawashima
- 申请人： Kei Masunishi , Akihiro Koga , Ryo Furukawa , Osamu Nishimura , Akio Kobayashi , Hiroyuki Kawashima
- 优先权： JP2007-206650 20070808
- 主分类号： A61B3/10
- IPC分类号： A61B3/10 ; G02B7/188
摘要：
A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.