公开(公告)号：US07604353B2

公开(公告)日：2009-10-20

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188 ,  G02B26/00

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US07033318B2

公开(公告)日：2006-04-25

申请号：US10721073

申请日：2003-11-26

申请人： Kei Masunishi

发明人： Kei Masunishi

IPC分类号： A61B1/00 ,  A61B ,  G02B6/00

CPC分类号： A61M25/0105 ,  A61M25/0158 ,  A61M2205/368

摘要： A photothermal actuator comprises an optical fiber bundle, a light inputting apparatus, and a thermal receiving element. The optical fiber bundle is inserted in a tube of a catheter etc. The light inputting apparatus inputs light into the optical fiber bundle. The thermal receiving element is provided on a part of an outer surface of the optical fiber bundle. The thermal receiving element is heated by the light so that the thermal receiving element and a part of the optical fiber bundle are stretched, whereby the optical fiber bundle and the tube are bent.

摘要翻译： 光热致动器包括光纤束，光输入装置和热接收元件。 将光纤束插入导管等的管中。光输入装置将光输入光纤束。 热接收元件设置在光纤束的外表面的一部分上。 热接收元件被光加热，使得热接收元件和光纤束的一部分被拉伸，由此使光纤束和管弯曲。

公开(公告)号：US08873218B2

公开(公告)日：2014-10-28

申请号：US13070250

申请日：2011-03-23

申请人： Kei Masunishi ,  Tamio Ikehashi ,  Yasushi Tomizawa ,  Akihiro Koga

发明人： Kei Masunishi ,  Tamio Ikehashi ,  Yasushi Tomizawa ,  Akihiro Koga

IPC分类号： H01G5/00 ,  H01G4/005 ,  H01H59/00 ,  H01G5/18

CPC分类号： H01H59/0009 ,  H01G5/18

摘要： According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.

摘要翻译： 根据一个实施例，致动器包括基板，设置在基板上的下电极，上电极，支架和驱动单元。 上电极与下电极相对。 支撑件支撑上电极。 驱动单元连接在下电极和上电极之间，并提供驱动电压。 下电极和上电极彼此接触的驱动电压被定义为引入电压。 下电极和上电极之间的电容被定义为引入电容。 存在第一区域和第二区域。 在第二区域中，当电位差的绝对值进一步增加时，电容比的变化率比第一区域变化更慢。 驱动单元在第二区域中馈送驱动电压。

公开(公告)号：US08564928B2

公开(公告)日：2013-10-22

申请号：US12883660

申请日：2010-09-16

申请人： Tamio Ikehashi ,  Tomohiro Saito ,  Yasushi Tomizawa ,  Kei Masunishi

发明人： Tamio Ikehashi ,  Tomohiro Saito ,  Yasushi Tomizawa ,  Kei Masunishi

IPC分类号： H01G5/16 ,  H01G7/00 ,  H01G5/00

CPC分类号： H01G5/16 ,  H01G5/011

摘要： According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

摘要翻译： 根据一个实施例，MEMS器件包括在基板上的电极，可移动结构，其通过基板上的第一和第二锚固部分支撑在电极之上的空中，并且朝向电极移动;第一弹簧结构，其将第一 锚定部分到可移动结构并使用延性材料;以及第二弹簧结构，其将第二锚固部分连接到可移动结构并使用脆性材料。

公开(公告)号：US20110063774A1

公开(公告)日：2011-03-17

申请号：US12883660

申请日：2010-09-16

申请人： Tamio Ikehashi ,  Tomohiro Saito ,  Yasushi Tomizawa ,  Kei Masunishi

发明人： Tamio Ikehashi ,  Tomohiro Saito ,  Yasushi Tomizawa ,  Kei Masunishi

IPC分类号： H01G5/011

CPC分类号： H01G5/16 ,  H01G5/011

摘要： According to one embodiment, a MEMS devise includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

摘要翻译： 根据一个实施例，MEMS设备包括在基板上的电极，可移动结构，其通过基板上的第一和第二锚固部分支撑在电极之上的空中，并且朝向电极移动;第一弹簧结构，其将第一 锚定部分到可移动结构并使用延性材料;以及第二弹簧结构，其将第二锚固部分连接到可移动结构并使用脆性材料。

公开(公告)号：US20080239528A1

公开(公告)日：2008-10-02

申请号：US12032871

申请日：2008-02-18

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： G02B26/00

CPC分类号： G02B26/0825

摘要： It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

摘要翻译： 可以提供可变形为复杂形状（高阶形状）的可变形反射镜装置。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件，具有第一开口，所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面，所述第二面围绕所述电极，并且在所述第二面上具有台阶 ; 驱动部，其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部，其在所述膜部露出并支撑所述膜部的底面具有开口部， 以及设置在所述膜部上的反射膜; 以及电压发生器，其被配置为分别在所述电极上产生预定的电压图案。

公开(公告)号：US20100051906A1

公开(公告)日：2010-03-04

申请号：US12549140

申请日：2009-08-27

申请人： Takashi Yamauchi ,  Yoshifumi Nishi ,  Hiroto Honda ,  Kei Masunishi ,  Shinji Murai ,  Masumi Saitoh

发明人： Takashi Yamauchi ,  Yoshifumi Nishi ,  Hiroto Honda ,  Kei Masunishi ,  Shinji Murai ,  Masumi Saitoh

IPC分类号： H01L31/0352

CPC分类号： H01L27/14645 ,  H01L27/14683 ,  H01L31/0352

摘要： A semiconductor device for correcting an input signal and outputting a corrected signal are provided. The semiconductor device includes a semiconductor layer, a plurality of first conductors formed on one of faces of the semiconductor layer and serving as input terminals to which a signal is input, second conductors of the number larger than that of the first conductors at density higher than that of the first conductors, formed on the other face of the semiconductor layer, a high impurity concentration region provided on the semiconductor layer side of an interface between the second conductor and the semiconductor layer, an insulating layer formed on the other face, and a plurality of third conductors formed on the insulating layer and serving as output terminals for outputting the processed signal.

摘要翻译： 提供了用于校正输入信号并输出​​校正信号的半导体器件。 半导体器件包括半导体层，形成在半导体层的一个表面上并用作输入信号的输入端的多个第一导体，第二导​​体的数量大于第一导体的密度高于 在半导体层的另一面形成的第一导体的第一导体的高杂质浓度区域设置在第二导体和半导体层之间的界面的半导体层侧，形成在另一面上的绝缘层， 多个第三导体，形成在绝缘层上并用作用于输出处理信号的输出端。

公开(公告)号：US20090051874A1

公开(公告)日：2009-02-26

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US20080204661A1

公开(公告)日：2008-08-28

申请号：US11955044

申请日：2007-12-12

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  A61B3/0091 ,  A61B3/1015 ,  A61B3/152 ,  G02B26/0841

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。

公开(公告)号：US20080180634A1

公开(公告)日：2008-07-31

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。