公开(公告)号：US20090051874A1

公开(公告)日：2009-02-26

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US07744220B2

公开(公告)日：2010-06-29

申请号：US12186142

申请日：2008-08-05

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B26/00 ,  G02B5/08

CPC分类号： G02B26/0825 ,  A61B3/10

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 以及反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠。 电极通过从包括与开口的中心对应的位置的区域径向延伸的多个槽电绝缘。

公开(公告)号：US07740357B2

公开(公告)日：2010-06-22

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B5/08

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US20080239528A1

公开(公告)日：2008-10-02

申请号：US12032871

申请日：2008-02-18

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： G02B26/00

CPC分类号： G02B26/0825

摘要： It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

摘要翻译： 可以提供可变形为复杂形状（高阶形状）的可变形反射镜装置。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件，具有第一开口，所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面，所述第二面围绕所述电极，并且在所述第二面上具有台阶 ; 驱动部，其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部，其在所述膜部露出并支撑所述膜部的底面具有开口部， 以及设置在所述膜部上的反射膜; 以及电压发生器，其被配置为分别在所述电极上产生预定的电压图案。

公开(公告)号：US07682030B2

公开(公告)日：2010-03-23

申请号：US12032871

申请日：2008-02-18

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： G02B7/188 ,  G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0825

摘要： It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

摘要翻译： 可以提供可变形为复杂形状（高阶形状）的可变形反射镜装置。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件，具有第一开口，所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面，所述第二面围绕所述电极，并且在所述第二面上具有台阶 ; 驱动部，其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部，其在所述膜部露出并支撑所述膜部的底面具有开口部， 以及设置在所述膜部上的反射膜; 以及电压发生器，其被配置为分别在所述电极上产生预定的电压图案。

公开(公告)号：US07604353B2

公开(公告)日：2009-10-20

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188 ,  G02B26/00

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US20080204661A1

公开(公告)日：2008-08-28

申请号：US11955044

申请日：2007-12-12

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  A61B3/0091 ,  A61B3/1015 ,  A61B3/152 ,  G02B26/0841

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。

公开(公告)号：US20080180634A1

公开(公告)日：2008-07-31

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US08873218B2

公开(公告)日：2014-10-28

申请号：US13070250

申请日：2011-03-23

申请人： Kei Masunishi ,  Tamio Ikehashi ,  Yasushi Tomizawa ,  Akihiro Koga

发明人： Kei Masunishi ,  Tamio Ikehashi ,  Yasushi Tomizawa ,  Akihiro Koga

IPC分类号： H01G5/00 ,  H01G4/005 ,  H01H59/00 ,  H01G5/18

CPC分类号： H01H59/0009 ,  H01G5/18

摘要： According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.

摘要翻译： 根据一个实施例，致动器包括基板，设置在基板上的下电极，上电极，支架和驱动单元。 上电极与下电极相对。 支撑件支撑上电极。 驱动单元连接在下电极和上电极之间，并提供驱动电压。 下电极和上电极彼此接触的驱动电压被定义为引入电压。 下电极和上电极之间的电容被定义为引入电容。 存在第一区域和第二区域。 在第二区域中，当电位差的绝对值进一步增加时，电容比的变化率比第一区域变化更慢。 驱动单元在第二区域中馈送驱动电压。

公开(公告)号：US07855946B2

公开(公告)日：2010-12-21

申请号：US12051094

申请日：2008-03-19

申请人： Akihiro Koga ,  Masahiro Kuwata ,  Kei Masunishi

发明人： Akihiro Koga ,  Masahiro Kuwata ,  Kei Masunishi

IPC分类号： G11B7/00

CPC分类号： G11B9/1481 ,  B82Y10/00 ,  G11B9/1454

摘要： A recording and reproducing apparatus supports a recording medium swingably in at least two axis directions by a support section formed in a shape having elasticity. When an access can be made to a memory, the recording medium is constantly and reciprocatingly moved in a direction along data row. Thus, a positional relationship with a probe head is always grasped. When an access is made, a moving time associated with position identification is reduced, and precise and fast movement is achieved.

摘要翻译： 记录和再现装置通过形成为具有弹性的形状的支撑部在至少两个轴向上可摆动地支撑记录介质。 当可以对存储器进行访问时，记录介质在沿着数据行的方向上不断地和往复地移动。 因此，始终掌握与探头的位置关系。 当进行访问时，减少与位置识别相关联的移动时间，并且实现精确和快速的移动。