发明申请
US20090057644A1 Phase-change memory units, methods of forming the phase-change memory units, phase-change memory devices having the phase-change memory units and methods of manufacturung the phase-change memory devices
审中-公开
相变存储器单元,形成相变存储器单元的方法,具有相变存储器单元的相变存储器件以及制造相变存储器件的方法
- 专利标题: Phase-change memory units, methods of forming the phase-change memory units, phase-change memory devices having the phase-change memory units and methods of manufacturung the phase-change memory devices
- 专利标题(中): 相变存储器单元,形成相变存储器单元的方法,具有相变存储器单元的相变存储器件以及制造相变存储器件的方法
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申请号: US12229500申请日: 2008-08-22
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公开(公告)号: US20090057644A1公开(公告)日: 2009-03-05
- 发明人: Hee-Ju Shin , Yong-Ho Ha , Jeong-Hee Park , Myung-Jin Kang , Doo-Hwan Park
- 申请人: Hee-Ju Shin , Yong-Ho Ha , Jeong-Hee Park , Myung-Jin Kang , Doo-Hwan Park
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., LTD
- 当前专利权人: Samsung Electronics Co., LTD
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2007-0085582 20070824
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A phase-change memory unit includes a lower electrode on a substrate, a phase-change material layer pattern including germanium-antimony-tellurium (GST) and carbon on the lower electrode, a transition metal layer pattern on the phase-change material layer pattern, and an upper electrode on the first transition metal layer pattern. The phase-change memory unit may have good electrical characteristics.
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