发明申请
US20090065473A1 MANUFACTURING METHOD FOR LIQUID DISCHARGE HEAD SUBSTRATE 有权
液体放电头基板的制造方法

MANUFACTURING METHOD FOR LIQUID DISCHARGE HEAD SUBSTRATE
摘要:
To provide a manufacturing method, for a liquid discharge head that includes a silicon substrate in which a supply port is formed for supplying a liquid, includes the steps of: providing the silicon substrate, a mask layer provided with an opening that corresponds to the supply port being provided on one face of the silicon substrate; forming a groove in the silicon substrate along the shape of the opening in the mask layer; removing, using sandblasting, silicon of the silicon substrate from the inner wall of the groove in the silicon substrate; and performing, from the one face, anisotropic etching of the silicon substrate that has been sandblasted, and forming the supply port.
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