发明申请
- 专利标题: MEMS SWITCH AND METHOD OF FABRICATING THE SAME
- 专利标题(中): MEMS开关及其制造方法
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申请号: US12187734申请日: 2008-08-07
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公开(公告)号: US20090071807A1公开(公告)日: 2009-03-19
- 发明人: Shinichi KOMINATO , Masao Segawa , Mariko Sugimoto , Takeshi Miyagi , Michinobu Inoue , Susumu Obata
- 申请人: Shinichi KOMINATO , Masao Segawa , Mariko Sugimoto , Takeshi Miyagi , Michinobu Inoue , Susumu Obata
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-206767 20070808
- 主分类号: H01H57/00
- IPC分类号: H01H57/00 ; H01L21/02
摘要:
A MEMS switch includes a field generator which generates an electric field in a predetermined space, a beam located in the space and made of an electrically conductive material, the beam being flexed downward when subjected to an electrostatic force due to the electric field, the beam being deformed so as to return upward by an elastic restoring force upon extinction of the electrostatic force, a signal line electrically connected to the beam when the beam is flexed downward, and a protective cap covering the field generator, the beam, and the signal line, thereby sealing the field generator, the beam, and the signal line.
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