发明申请
- 专利标题: Non-Volatile Memory Devices and Methods of Forming the Same
- 专利标题(中): 非易失性存储器件及其形成方法
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申请号: US12274166申请日: 2008-11-19
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公开(公告)号: US20090081835A1公开(公告)日: 2009-03-26
- 发明人: Seong-Gyun Kim , Ji-Hoon Park , Sang-Woo Kang , Sung-Woo Park
- 申请人: Seong-Gyun Kim , Ji-Hoon Park , Sang-Woo Kang , Sung-Woo Park
- 优先权: KR2004-80459 20041008
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A non-volatile memory device includes an upwardly protruding fin disposed on a substrate and a control gate electrode crossing the fin. A floating gate is interposed between the control gate electrode and the fin and includes a first storage gate and a second storage gate. The first storage gate is disposed on a sidewall of the fin, and the second storage gate is disposed on a top surface of the fin and is connected to the first storage gate. A first insulation layer is interposed between the first storage gate and the sidewall of the fin, and a second insulation layer is interposed between the second storage gate and the top surface of the fin. The second insulation layer is thinner than the first insulation layer. A blocking insulation pattern is interposed between the control gate electrode and the floating gate.
公开/授权文献
- US07723188B2 Non-volatile memory devices and methods of forming the same 公开/授权日:2010-05-25
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