发明申请
- 专利标题: PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD USING THE SAME
- 专利标题(中): 压电致动器和使用其的液体排出头
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申请号: US12237933申请日: 2008-09-25
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公开(公告)号: US20090091215A1公开(公告)日: 2009-04-09
- 发明人: Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
- 申请人: Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-260942 20071004
- 主分类号: H01L41/00
- IPC分类号: H01L41/00
摘要:
The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.
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