Invention Application
- Patent Title: PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD USING THE SAME
- Patent Title (中): 压电致动器和使用其的液体排出头
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Application No.: US12237933Application Date: 2008-09-25
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Publication No.: US20090091215A1Publication Date: 2009-04-09
- Inventor: Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
- Applicant: Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Priority: JP2007-260942 20071004
- Main IPC: H01L41/00
- IPC: H01L41/00

Abstract:
The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.
Public/Granted literature
- US07999441B2 Piezoelectric actuator and liquid discharge head using the same Public/Granted day:2011-08-16
Information query
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