发明申请
US20090095708A1 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD 有权
制造液体放电头的方法

METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
摘要:
A method for manufacturing a liquid discharge head including a substrate on which supply ports for supplying a liquid are provided, includes forming a first supply port among the supply ports by performing crystal anisotropic etching on the substrate from one surface of the substrate, and forming a plurality of second supply ports among the supply ports by performing dry etching on the substrate using a crystal anisotropic etching method from a surface exposed toward the one surface of the substrate to a rear surface so that the independent second supply ports are respectively opened on the rear surface.
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