发明申请
- 专利标题: METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
- 专利标题(中): 制造液体放电头的方法
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申请号: US12251229申请日: 2008-10-14
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公开(公告)号: US20090095708A1公开(公告)日: 2009-04-16
- 发明人: Masahiko Kubota , Akihiko Okano
- 申请人: Masahiko Kubota , Akihiko Okano
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-268798 20071016; JP2007-315818 20071206
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A method for manufacturing a liquid discharge head including a substrate on which supply ports for supplying a liquid are provided, includes forming a first supply port among the supply ports by performing crystal anisotropic etching on the substrate from one surface of the substrate, and forming a plurality of second supply ports among the supply ports by performing dry etching on the substrate using a crystal anisotropic etching method from a surface exposed toward the one surface of the substrate to a rear surface so that the independent second supply ports are respectively opened on the rear surface.
公开/授权文献
- US08778200B2 Method for manufacturing liquid discharge head 公开/授权日:2014-07-15
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