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    Laser processing method
    1.
    发明授权
    Laser processing method 有权
    激光加工方法

    公开(公告)号：US08829391B2

    公开(公告)日：2014-09-09

    申请号：US12907349

    申请日：2010-10-19

    申请人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

    发明人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

    IPC分类号： B23K26/42 ,  B23K26/40 ,  B23K26/18 ,  B23K26/36 ,  H01L21/268 ,  B23K26/00

    CPC分类号： B23K26/18 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K26/60 ,  B23K2103/50 ,  H01L21/268

    摘要： A laser processing method of processing an object to be processed. The object to be processed has a modified portion and a non-modified portion. A modified layer forming step forms a modified layer of the object to be processed by scanning an inner portion of the object with a condensing point of first laser light. The modified layer (i) has a processing speed with second laser light that is lower than a processing speed of a non-modified portion and (ii) is formed below the non-modified portion. A removing step removes a portion of the non-modified portion. The portion of the non-modified portion ranges from a surface of the object to the modified layer. The removing step includes irradiating the portion of the non-modified portion with the second laser light.

    摘要翻译： 一种处理被处理物体的激光加工方法。 待处理对象具有修改部分和未修改部分。 改性层形成步骤通过用第一激光的聚光点扫描物体的内部来形成被处理物体的改性层。 改性层（i）的处理速度与第二激光的处理速度相比低于非变形部的处理速度，（ii）形成在非变形部的下方。 去除步骤去除未修饰部分的一部分。 未改性部分的部分从物体的表面到改性层的范围。 去除步骤包括用第二激光照射非改性部分的部分。

    LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE LIQUID DISCHARGE HEAD
    4.
    发明申请
    LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE LIQUID DISCHARGE HEAD 有权
    液体放电头及液体放电头制造方法

    公开(公告)号：US20100156990A1

    公开(公告)日：2010-06-24

    申请号：US12629238

    申请日：2009-12-02

    申请人： Masafumi Morisue ,  Takumi Suzuki ,  Masahiko Kubota ,  Ryoji Kanri ,  Akihiko Okano ,  Atsushi Hiramoto

    发明人： Masafumi Morisue ,  Takumi Suzuki ,  Masahiko Kubota ,  Ryoji Kanri ,  Akihiko Okano ,  Atsushi Hiramoto

    IPC分类号： B41J2/14 ,  B23P17/00

    CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14467 ,  Y10T29/494

    摘要： A liquid discharge head includes an Si substrate which is provided with an element for generating energy used in discharging a liquid and a liquid supply port which is provided to pass through the Si substrate from first surface to rear surface so as to supply a liquid to the element. A method of manufacturing the substrate includes: forming a plurality of concave portions on the rear surface of the Si substrate of which a plane orientation is {100}, the concave portions facing the first surface and aligned in rows along a direction the first surface; and forming a plurality of the supply ports by carrying out a crystal axis anisotropic etching on the Si substrate through the concave portions using an etching liquid of which an etching rate of the {100} plane of the Si substrate is slower than that of the {110} plane of the Si substrate.

    摘要翻译： 液体排出头包括：Si基板，其设置有用于产生用于排出液体的能量的元件和液体供给口，所述液体供给口被设置成从第一表面到后表面穿过Si基板，从而将液体供应到 元件。 一种制造基板的方法包括：在Si基板的背面上形成多个凹部，其中平面取向为{100}，凹面朝向第一表面并且沿着<100>方向排成一列 第一表面 并且通过使用其中Si衬底的{100}面的蚀刻速率比{D“的{100}面的蚀刻速度慢的蚀刻液，通过凹部对Si衬底进行晶轴各向异性蚀刻来形成多个供给口， 110}面。

    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
    5.
    发明授权
    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
    液体排出头的制造方法以及使用该方法得到的排液头

    公开(公告)号：US07629111B2

    公开(公告)日：2009-12-08

    申请号：US10576249

    申请日：2005-06-27

    申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

    发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2002/14475 ,  G03F7/038

    摘要： A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

    摘要翻译： 一种制造液体排出头的方法包括以下步骤：在其上布置能量产生元件的衬底上沉积用于形成流路的固体层，以产生用于排出液体的能量，在衬底上形成固体 层，用于涂覆固体层的涂层，在固体层上形成的涂层中，通过光刻工艺形成用于排出液体的排出口，并除去固体层，形成连通的流路 能量元件和排出口，由此用于涂层的材料含有可阳离子聚合的化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成与部分的边界的固体层的材料 其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。

    Liquid ejection head and manufacturing method thereof
    8.
    发明授权
    Liquid ejection head and manufacturing method thereof 有权
    液体喷射头及其制造方法

    公开(公告)号：US08191260B2

    公开(公告)日：2012-06-05

    申请号：US12400440

    申请日：2009-03-09

    申请人： Maki Kato ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano

    发明人： Maki Kato ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano

    IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/135

    CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

    摘要： A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.

    摘要翻译： 液体喷射头的制造方法包括在基板上形成与等高的固体层接触的第一流路壁形成部件，暴露第一层的负型感光性树脂材料，形成喷出口形成部件; 在第一层上暴露第二层为负的感光性树脂材料，以形成用于形成流路的壁的另一部分的第二流路壁形成部件; 将暴露的第一和第二层放置在固体层和第一流动通道壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一和第二层的未暴露部分来形成流动通道和喷射出口的部分; 并通过去除固体层形成流动通道。

    MANUFACTURING METHOD OF LIQUID EJECTION HEAD
    9.
    发明申请
    MANUFACTURING METHOD OF LIQUID EJECTION HEAD 审中-公开
    液体喷射头的制造方法

    公开(公告)号：US20090136875A1

    公开(公告)日：2009-05-28

    申请号：US12268740

    申请日：2008-11-11

    申请人： Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano ,  Maki Kato ,  Kazuhiro Asai ,  Masaki Ohsumi ,  Yoshinori Tagawa

    发明人： Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano ,  Maki Kato ,  Kazuhiro Asai ,  Masaki Ohsumi ,  Yoshinori Tagawa

    IPC分类号： G03F7/20

    CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1645

    摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.

    摘要翻译： 一种液体喷射头的制造方法，包括：喷射出口形成部件，其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括：准备基板，在该基板上形成流路壁形成部件， 形成流路的壁的一部分，并且具有所述流路的一部分形状的固体层彼此接触，其中所述流路壁形成构件具有与所述基板的表面基本相等的高度 的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层，由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。

    Liquid discharge head and method of manufacturing a substrate for the liquid discharge head
    10.
    发明授权
    Liquid discharge head and method of manufacturing a substrate for the liquid discharge head 有权
    液体排出头及液体排出头用基板的制造方法

    公开(公告)号：US08366951B2

    公开(公告)日：2013-02-05

    申请号：US12629238

    申请日：2009-12-02

    申请人： Masafumi Morisue ,  Takumi Suzuki ,  Masahiko Kubota ,  Ryoji Kanri ,  Akihiko Okano ,  Atsushi Hiramoto

    发明人： Masafumi Morisue ,  Takumi Suzuki ,  Masahiko Kubota ,  Ryoji Kanri ,  Akihiko Okano ,  Atsushi Hiramoto

    IPC分类号： G01D15/00

    CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14467 ,  Y10T29/494

    摘要： A liquid discharge head includes an Si substrate which is provided with an element for generating energy used in discharging a liquid and a liquid supply port which is provided to pass through the Si substrate from a first surface to a rear surface so as to supply a liquid to the element. A method of manufacturing the substrate includes: forming a plurality of concave portions on the rear surface of the Si substrate of which a plane orientation is {100}, the concave portions facing the first surface and aligned in rows along a direction of the Si substrate; and forming a plurality of the liquid supply ports by carrying out a crystal axis anisotropic etching on the Si substrate through the concave portions using an etching liquid of which an etching rate of the {100} plane of the Si substrate is slower than that of the {110} plane of the Si substrate.

    摘要翻译： 液体排出头包括：Si基板，其设置有用于产生用于排出液体的能量的元件;以及液体供给口，其被设置成从第一表面到后表面穿过Si基板，以便供应液体 到元素 制造基板的方法包括：在Si基板的后表面上形成多个凹部，其平面取向为{100}，所述凹部面向第一表面并沿着<100> Si衬底; 并且通过使用其中Si衬底的{100}面的蚀刻速率慢于所述Si衬底的蚀刻速率的蚀刻液，通过所述凹部对所述Si衬底进行晶轴各向异性蚀刻来形成多个所述液体供给口 {110}面的Si衬底。