公开(公告)号：US08613141B2

公开(公告)日：2013-12-24

申请号：US12268760

申请日：2008-11-11

申请人： Akihiko Okano ,  Maki Kato ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato

发明人： Akihiko Okano ,  Maki Kato ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato

IPC分类号： B41J2/16 ,  B21D53/76

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/164 ,  B41J2002/14475

摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.

摘要翻译： 具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层 具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

公开(公告)号：US08398212B2

公开(公告)日：2013-03-19

申请号：US12635948

申请日：2009-12-11

申请人： Akihiko Okano ,  Masahiko Kubota ,  Ryoji Kanri ,  Atsushi Hiramoto

发明人： Akihiko Okano ,  Masahiko Kubota ,  Ryoji Kanri ,  Atsushi Hiramoto

IPC分类号： B41J2/05

CPC分类号： B41J2/1404 ,  B41J2/14145 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1634

摘要： An ink jet head includes a Si substrate with a surface having a {100} orientation; a passage holding ink on the Si substrate; an ink discharge port which is communicatively connected to the passage and through which ink is ejected; and a supply port which extends through the Si substrate, which is communicatively connected to the passage, and which supplies ink to the passage. The supply port has walls having two {111} planes facing each other.

摘要翻译： 喷墨头包括具有{100}取向的表面的Si衬底; 在Si衬底上保持油墨的通道; 墨水排出口，其连通地连接到通道并通过其喷射墨水; 以及供应端口，其延伸穿过Si衬底，其通信地连接到通道，并且向通道供应墨水。 供应端口具有彼此面对的两个{111}平面的壁。

公开(公告)号：US08017307B2

公开(公告)日：2011-09-13

申请号：US10568341

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03F7/20

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  G03F7/095 ,  Y10T29/49401

摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

摘要翻译： 微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括 作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤 材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

公开(公告)号：US20090095708A1

公开(公告)日：2009-04-16

申请号：US12251229

申请日：2008-10-14

申请人： Masahiko Kubota ,  Akihiko Okano

发明人： Masahiko Kubota ,  Akihiko Okano

IPC分类号： G11B5/127

CPC分类号： B81C1/00523 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14403 ,  B41J2002/14467

摘要： A method for manufacturing a liquid discharge head including a substrate on which supply ports for supplying a liquid are provided, includes forming a first supply port among the supply ports by performing crystal anisotropic etching on the substrate from one surface of the substrate, and forming a plurality of second supply ports among the supply ports by performing dry etching on the substrate using a crystal anisotropic etching method from a surface exposed toward the one surface of the substrate to a rear surface so that the independent second supply ports are respectively opened on the rear surface.

摘要翻译： 一种液体排出头的制造方法，其特征在于，具备：基板，其上设置有用于供给液体的供给口的基板，包括：在所述基板的一个表面上对所述基板进行结晶各向异性蚀刻，形成供给口中的第一供给口， 通过使用晶体各向异性蚀刻方法从从衬底的一个表面暴露的表面到后表面在基板上对基板进行干蚀刻，使得独立的第二供给端口分别在后部分别地开放，从而在供给端口中的多个第二供给口 表面。

公开(公告)号：US20080252689A1

公开(公告)日：2008-10-16

申请号：US11941431

申请日：2007-11-16

申请人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

发明人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

IPC分类号： B41J2/135 ,  G03F7/20

CPC分类号： B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  B41J2202/11 ,  G03F1/00 ,  G03F1/50 ,  G03F1/70

摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.

摘要翻译： 本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。 该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到 排出口，其中该层对于曝光用的光，每1μm厚度的吸光度为约0.02至约0.07。

公开(公告)号：US08778200B2

公开(公告)日：2014-07-15

申请号：US12251229

申请日：2008-10-14

申请人： Masahiko Kubota ,  Akihiko Okano

发明人： Masahiko Kubota ,  Akihiko Okano

IPC分类号： G01D15/00 ,  G11B5/127 ,  B81C1/00 ,  B41J2/16

CPC分类号： B81C1/00523 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14403 ,  B41J2002/14467

摘要： A method for manufacturing a liquid discharge head including a substrate on which supply ports for supplying a liquid are provided, includes forming a first supply port among the supply ports by performing crystal anisotropic etching on the substrate from one surface of the substrate, and forming a plurality of second supply ports among the supply ports by performing dry etching on the substrate using a crystal anisotropic etching method from a surface exposed toward the one surface of the substrate to a rear surface so that the independent second supply ports are respectively opened on the rear surface.

摘要翻译： 一种液体排出头的制造方法，其特征在于，具备：基板，其上设置有用于供给液体的供给口的基板，包括：在所述基板的一个表面上对所述基板进行结晶各向异性蚀刻，形成供给口中的第一供给口， 通过使用晶体各向异性蚀刻方法从从衬底的一个表面暴露的表面到后表面在基板上对基板进行干蚀刻，使得独立的第二供给端口分别在后部分别地开放，从而在供给端口中的多个第二供给口 表面。

公开(公告)号：US08419168B2

公开(公告)日：2013-04-16

申请号：US13218851

申请日：2011-08-26

申请人： Akihiko Okano ,  Masahiko Kubota ,  Ryoji Kanri ,  Yoshiyuki Fukumoto ,  Masafumi Morisue

发明人： Akihiko Okano ,  Masahiko Kubota ,  Ryoji Kanri ,  Yoshiyuki Fukumoto ,  Masafumi Morisue

IPC分类号： B41J2/04

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  Y10T29/49401

摘要： Provided is a liquid ejection head including a substrate including a liquid supply port and an energy generating element, in which the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.

摘要翻译： 本发明提供一种液体喷射头，其特征在于，包括：液体供给口和能量产生元件的基板，所述液体供给口和能量产生元件的壁面形成有至少一个槽形状，所述至少一个槽形状从后表面 ，其是形成有能量产生元件的正面的表面朝向前表面。

公开(公告)号：US08227043B2

公开(公告)日：2012-07-24

申请号：US10565658

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B05D1/36 ,  B05D7/00

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2002/14475 ,  Y10T29/49401

摘要： A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

摘要翻译： 一种液体排出头的制造方法，其特征在于，包括以下步骤：在基板上形成固体层，所述基板上配置能量产生元件，以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。 用于涂层的材料包含阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，并且与形成涂层的排出口的部分形成边界的固体层的材料包含 甲基丙烯酸和甲基丙烯酸酯的共聚物。

公开(公告)号：US07971964B2

公开(公告)日：2011-07-05

申请号：US11941431

申请日：2007-11-16

申请人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

发明人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

IPC分类号： B41J2/14

CPC分类号： B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  B41J2202/11 ,  G03F1/00 ,  G03F1/50 ,  G03F1/70

摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.

摘要翻译： 本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。 该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到 排出口，其中该层对于曝光用的光具有每1μm厚度的约0.02至约0.07的吸光度。

公开(公告)号：US20110108532A1

公开(公告)日：2011-05-12

申请号：US12907349

申请日：2010-10-19

申请人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

发明人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

IPC分类号： B23K26/38

CPC分类号： B23K26/18 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K26/60 ,  B23K2103/50 ,  H01L21/268

摘要： Provided is a laser processing method capable of improving precision of a processing shape and degree of freedom of the processing shape. When a recess portion is formed in a substrate (W) which is an object to be processed, an inner portion of the substrate (W) is scanned with a condensing point (LS1) of modification laser light (L1) which is first laser light to form a modified layer (Wr) which becomes a boundary of a laser processing region (R1) in a position corresponding to a bottom part of the recess portion (modified layer forming step). Next, a surface (Wa) of the substrate (W) is irradiated with condensed processing laser light which is second laser light to remove and process the laser processing region (R1) defined by the modified layer (Wr), to thereby form the recess portion (removing/processing step).

摘要翻译： 提供了能够提高加工形状的精度和加工形状的自由度的激光加工方法。 当在作为被加工物的基板（W）上形成有凹部时，用作为第一激光的变形激光（L1）的聚光点（LS1）扫描基板（W）的内部， 形成在与凹部（修饰层形成工序）的底部对应的位置成为激光加工区域（R1）的边界的改质层（Wr）。 接下来，用作为第二激光的聚光处理用激光照射基板（W）的表面（Wa），以去除并处理由改性层（Wr）限定的激光加工区域（R1），从而形成凹部 部分（去除/处理步骤）。