发明申请
US20090096321A1 SURFACE ACOUSTIC WAVE DEVICE, AND MANUFACTURING METHOD THEREFOR 失效
表面声波装置及其制造方法

SURFACE ACOUSTIC WAVE DEVICE, AND MANUFACTURING METHOD THEREFOR
摘要:
A surface acoustic wave device is enable to prevent electrode erosion, without any specific environmental process. The surface acoustic wave device includes a piezoelectric substrate, an electrode for the formation of surface acoustic wave, being formed on the piezoelectric substrate, on the piezoelectric substrate, a frame-shaped layer surrounding the electrode for the formation of surface acoustic wave, and a lid body formed on the frame-shaped layer by bonding, so as to form a hollow portion between the lid body and the electrode for the formation of surface acoustic wave. The frame-shaped layer and the lid body include photosensitive resin, and the lid body includes a through hole, and the through hole is sealed with a halogen-free thermosetting resin.
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