发明申请
US20090104563A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR
有权
抗蚀剂组合物,形成抗蚀剂图案,新型化合物和酸产生剂的方法
- 专利标题: RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR
- 专利标题(中): 抗蚀剂组合物,形成抗蚀剂图案,新型化合物和酸产生剂的方法
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申请号: US12251327申请日: 2008-10-14
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公开(公告)号: US20090104563A1公开(公告)日: 2009-04-23
- 发明人: Keita Ishiduka , Yoshiyuki Utsumi , Akiya Kawaue , Takehiro Seshimo , Hideo Hada
- 申请人: Keita Ishiduka , Yoshiyuki Utsumi , Akiya Kawaue , Takehiro Seshimo , Hideo Hada
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2007-274340 20071022; JP2008-048103 20080228
- 主分类号: G03F7/028
- IPC分类号: G03F7/028 ; G03F7/20 ; C07C309/02 ; C07C309/78
摘要:
There is provided a compound represented by a general formula (B1-1) shown below, an acid generator composed of the above compound, a resist composition containing an acid generator composed of the above compound, and a method of forming a resist pattern: (wherein RX represents a hydrocarbon group which may contain a substituent group; Q1 represents an alkylene group of 1 to 12 carbon atoms which may contain a substituent group, or a single bond; n represents an integer of 0 or 1; Y1 represents an alkylene group of 1 to 4 carbon atoms, or a fluorinated alkylene group of 1 to 4 carbon atoms; and A+ represents an organic cation which contains a nitrogen atom).
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