发明申请
- 专利标题: Group III nitride semiconductor manufacturing system
- 专利标题(中): III族氮化物半导体制造系统
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申请号: US12289257申请日: 2008-10-23
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公开(公告)号: US20090106959A1公开(公告)日: 2009-04-30
- 发明人: Shiro Yamazaki , Koji Hirata
- 申请人: Shiro Yamazaki , Koji Hirata
- 申请人地址: JP Aichi-ken
- 专利权人: TOYODA GOSEI CO., LTD.
- 当前专利权人: TOYODA GOSEI CO., LTD.
- 当前专利权人地址: JP Aichi-ken
- 优先权: JPP2007-278935 20071026
- 主分类号: H01L21/67
- IPC分类号: H01L21/67
摘要:
The invention provides a group III nitride semiconductor manufacturing system which is free from interruption to rotation of a rotational shaft. The group III nitride semiconductor manufacturing system has a reacting vessel having an opening, a crucible disposed in an interior of the reaction vessel and containing a melt including at least a group III metal and an alkali metal, a holding unit supporting the crucible and having a rotational shaft extending from the interior of the reaction vessel to an exterior of the reaction vessel through the opening, a rotational shaft cover covering a part of the rotational shaft positioned at the exterior of the reacting vessel and connected to the reacting vessel at the opening, a rotational driving unit disposed at an outside of the reacting vessel and regulating the rotational shaft and a supply pipe connected to the rotational shaft cover and supplying a gas including at least nitrogen into a gap between the rotational shaft and the rotational shaft cover, wherein the gas and the melt react to grow a group III nitride semiconductor crystal.
公开/授权文献
- US08343239B2 Group III nitride semiconductor manufacturing system 公开/授权日:2013-01-01
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