发明申请
- 专利标题: Solder-top Enhanced Semiconductor Device and Method for Low Parasitic Impedance Packaging
- 专利标题(中): 焊接增强型半导体器件和低寄生阻抗封装方法
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申请号: US11932845申请日: 2007-10-31
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公开(公告)号: US20090108456A1公开(公告)日: 2009-04-30
- 发明人: Francois Hebert , Anup Bhalla , Kai Liu , Ming Sun
- 申请人: Francois Hebert , Anup Bhalla , Kai Liu , Ming Sun
- 主分类号: H01L23/488
- IPC分类号: H01L23/488 ; H01L21/60
摘要:
A solder-top enhanced semiconductor device is proposed for packaging. The solder-top device includes a device die with a top metal layer patterned into contact zones and contact enhancement zones. At least one contact zone is electrically connected to at least one contact enhancement zone. Atop each contact enhancement zone is a solder layer for an increased composite thickness thus lowered parasitic impedance. Where the top metal material can not form a uniform good electrical bond with the solder material, the device die further includes an intermediary layer sandwiched between and forming a uniform electrical bond with the top metal layer and the solder layer. A method for making the solder-top device includes: a) Lithographically patterning the top metal layer into the contact zones and the contact enhancement zones. b) Forming a solder layer atop each of the contact enhancement zones using a stencil process for an increased composite thickness.
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