发明申请
- 专利标题: ALIGNMENT METHOD, IMPRINT METHOD, ALIGNMENT APPARATUS, AND POSITION MEASUREMENT METHOD
- 专利标题(中): 对准方法,印刷方法,对准装置和位置测量方法
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申请号: US11719878申请日: 2007-04-18
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公开(公告)号: US20090108483A1公开(公告)日: 2009-04-30
- 发明人: Nobuhito Suehira , Junichi Seki , Hideki Ina , Koichi Sentoku
- 申请人: Nobuhito Suehira , Junichi Seki , Hideki Ina , Koichi Sentoku
- 优先权: JP114093/2006 20060418; JP305239/2006 20061110; JP036598/2007 20070216
- 国际申请: PCT/JP07/58898 WO 20070418
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; G01B11/00
摘要:
In an alignment method for effecting alignment between two plate-like objects, a first plate-like object provided with a first alignment mark and a second plate-like object provide with a second alignment mark are disposed opposite to each other. A first area and a second area are provided at mutually nonoverlapping positions in an image pickup area for being observed through an image pickup device. Images of the first and second alignment marks are picked up by the image pickup device from a direction substantially perpendicular to an in-plane direction of the first and second plate-like objects. Alignment control is effected by using first information about a deviation of the first alignment mark from a predetermined position in the first area and second information about a deviation of the second alignment mark from a predetermined position in the second area.