Invention Application
US20090119634A1 Method and System for Implementing Controlled Breaks Between Features Using Sub-Resolution Assist Features 有权
使用子分辨率辅助功能实现特征间可控断点的方法和系统

  • Patent Title: Method and System for Implementing Controlled Breaks Between Features Using Sub-Resolution Assist Features
  • Patent Title (中): 使用子分辨率辅助功能实现特征间可控断点的方法和系统
  • Application No.: US11934662
    Application Date: 2007-11-02
  • Publication No.: US20090119634A1
    Publication Date: 2009-05-07
  • Inventor: Jason Sweis
  • Applicant: Jason Sweis
  • Applicant Address: US CA San Jose
  • Assignee: CADENCE DESIGN SYSTEMS, INC.
  • Current Assignee: CADENCE DESIGN SYSTEMS, INC.
  • Current Assignee Address: US CA San Jose
  • Main IPC: G06F17/50
  • IPC: G06F17/50
Method and System for Implementing Controlled Breaks Between Features Using Sub-Resolution Assist Features
Abstract:
Disclosed is a method, system, and computer program product for implementing controlled breaks using sub-resolution assist features. Sub-resolution bridging features are added to implement controlled breaks between features on the layout. The bridging features may also be used to facilitate or optimize multiple mask/exposure techniques that split a layout or features on a layout to address pitch problems.
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