Invention Application
- Patent Title: Method and System for Implementing Controlled Breaks Between Features Using Sub-Resolution Assist Features
- Patent Title (中): 使用子分辨率辅助功能实现特征间可控断点的方法和系统
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Application No.: US11934662Application Date: 2007-11-02
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Publication No.: US20090119634A1Publication Date: 2009-05-07
- Inventor: Jason Sweis
- Applicant: Jason Sweis
- Applicant Address: US CA San Jose
- Assignee: CADENCE DESIGN SYSTEMS, INC.
- Current Assignee: CADENCE DESIGN SYSTEMS, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Disclosed is a method, system, and computer program product for implementing controlled breaks using sub-resolution assist features. Sub-resolution bridging features are added to implement controlled breaks between features on the layout. The bridging features may also be used to facilitate or optimize multiple mask/exposure techniques that split a layout or features on a layout to address pitch problems.
Public/Granted literature
- US08103985B2 Method and system for implementing controlled breaks between features using sub-resolution assist features Public/Granted day:2012-01-24
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