发明申请
- 专利标题: COUNTER-BALANCED SUBSTRATE SUPPORT
- 专利标题(中): 计数平衡基板支持
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申请号: US12059820申请日: 2008-03-31
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公开(公告)号: US20090120584A1公开(公告)日: 2009-05-14
- 发明人: Dmitry Lubomirsky , Toan Q. Tran , Lun Tsuei , Manuel A. Hernandez , Kirby H. Floyd , Ellie Y. Yieh
- 申请人: Dmitry Lubomirsky , Toan Q. Tran , Lun Tsuei , Manuel A. Hernandez , Kirby H. Floyd , Ellie Y. Yieh
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23F1/08
- IPC分类号: C23F1/08 ; B05C13/00 ; B05C15/00 ; H01L21/677 ; B05C21/00
摘要:
A semiconductor processing system is described. The system includes a processing chamber having an interior capable of holding an internal chamber pressure below ambient atmospheric pressure. The system also includes a pumping system coupled to the chamber and adapted to remove material from the processing chamber. The system further includes a substrate support pedestal, where the substrate support pedestal is rigidly coupled to a substrate support shaft extending through a wall of the processing chamber. A bracket located outside the processing chamber is provided which is rigidly and sometimes rotatably coupled to the substrate support shaft. A motor coupled to the bracket can be actuated to vertically translate the substrate support pedestal, shaft and bracket from a first position to a second position closer to a processing plate. A piston mounted on an end of the bracket provides a counter-balancing force to a tilting force, where the tilting force is generated by a change in the internal chamber pressure and causes a deflection in the position of the bracket and the substrate support. The counter-balancing force reduces the deflection of the bracket and the substrate support.