发明申请
- 专利标题: PHOTOSENSITIVE RESIN COMPOSITION AND ADHESION PROMOTER
- 专利标题(中): 光敏树脂组合物和粘合促进剂
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申请号: US11994300申请日: 2006-04-18
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公开(公告)号: US20090123867A1公开(公告)日: 2009-05-14
- 发明人: Tomoyuki Yuba , Yoji Fujita , Masao Tomikawa
- 申请人: Tomoyuki Yuba , Yoji Fujita , Masao Tomikawa
- 申请人地址: JP TOKYO
- 专利权人: TORAY INDUSTRIES, INC.
- 当前专利权人: TORAY INDUSTRIES, INC.
- 当前专利权人地址: JP TOKYO
- 优先权: JP2005-191346 20050630
- 国际申请: PCT/JP2006/308093 WO 20060418
- 主分类号: G03F7/075
- IPC分类号: G03F7/075 ; G03F7/20 ; C07F7/10
摘要:
The present invention provides a photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a silicon compound having a secondary aromatic amino group and an alkoxy group, and (c) at least one selected from a photopolymerization initiator, a photo acid generator and a photo base generator. According to the present invention, it is possible to obtain a photosensitive resin composition which remarkably enhances the adhesion property with a substrate after curing without deteriorating storage stability of a solution, and does not cause peeling of a fine pattern even upon development.
公开/授权文献
- US07977028B2 Photosensitive resin composition and adhesion promoter 公开/授权日:2011-07-12
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