发明申请
- 专利标题: Colored mask combined with selective area deposition
- 专利标题(中): 彩色面罩与选择性区域沉积相结合
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申请号: US11986169申请日: 2007-11-20
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公开(公告)号: US20090130609A1公开(公告)日: 2009-05-21
- 发明人: Lyn M. Irving , Diane C. Freeman , Peter J. Cowdery-Corvan , Cheng Yang , David H. Levy
- 申请人: Lyn M. Irving , Diane C. Freeman , Peter J. Cowdery-Corvan , Cheng Yang , David H. Levy
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
The invention relates to a process for forming a structure comprising (a) providing a transparent support; (b) forming a color mask on a first side of the transparent support; (c) applying a first layer comprising a deposition inhibitor material that is sensitive to visible light; (d) patterning the first layer by exposing the first layer through the color mask with visible light to form a first pattern and developing the deposition inhibitor material to provide selected areas of the first layer effectively not having the deposition inhibitor material; and (e) depositing a second layer of functional material over the transparent support; wherein the second layer of functional material is substantially deposited only in selected areas over the transparent support not having the deposition inhibitor material.
公开/授权文献
- US08129098B2 Colored mask combined with selective area deposition 公开/授权日:2012-03-06
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