发明申请
- 专利标题: NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 非挥发性半导体存储器件及其制造方法
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申请号: US12273308申请日: 2008-11-18
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公开(公告)号: US20090134449A1公开(公告)日: 2009-05-28
- 发明人: Tsuyoshi Arigane , Digh Hisamoto , Yasuhiro Shimamoto , Toshiyuki Mine
- 申请人: Tsuyoshi Arigane , Digh Hisamoto , Yasuhiro Shimamoto , Toshiyuki Mine
- 专利权人: RENESAS TECHNOLOGY CORP.
- 当前专利权人: RENESAS TECHNOLOGY CORP.
- 优先权: JPJP2007-303639 20071122
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L21/336
摘要:
Provided is a nonvolatile semiconductor memory device highly integrated and highly reliable. A plurality of memory cells are formed in a plurality of active regions sectioned by a plurality of isolations (silicon oxide films) extending in the Y direction and deeper than a well (p type semiconductor region). In each memory cell, a contact is provided in the well (p type semiconductor region) so as to penetrate through a source diffusion layer (n+ type semiconductor region), and the contact that electrically connects bit lines (metal wirings) and the source diffusion layer (n+ type semiconductor region) is also electrically connected to the well (p type semiconductor region).
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