发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US12277448申请日: 2008-11-25
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公开(公告)号: US20090140316A1公开(公告)日: 2009-06-04
- 发明人: Takashi Sugihara , Minori Kajimoto
- 申请人: Takashi Sugihara , Minori Kajimoto
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-308990 20071129
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L29/788
摘要:
A semiconductor memory device includes an insulating film formed on a semiconductor substrate, a plurality of active areas formed on the insulating film from a semiconductor layer which is formed integrally with the substrate through openings of the insulating film, the active areas being formed by being divided into a striped shape by a plurality of trenches reaching an upper surface of the insulating film, the active areas having upper surfaces and sides respectively, a first gate insulating film formed so as to cover the upper surfaces and sides of the active areas, a charge trap layer having a face located on the first gate insulating film and confronting the upper surfaces and the sides of the active areas with the first gate insulating film being interposed therebetween, a second gate insulating film formed on the charge trap layer, and a gate electrode formed on the second gate insulating film.
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