发明申请
- 专利标题： CHIP ON WAFER BONDER
- 专利标题（中）： 芯片在波形焊机上
-
申请号： US12054097申请日： 2008-03-24
-
公开(公告)号： US20090142903A1公开(公告)日： 2009-06-04
- 发明人: Chen-Hua Yu , Jui-Pin Hung , Weng-Jin Wu , Jean Wang , Wen-Chih Chiou
- 申请人： Chen-Hua Yu , Jui-Pin Hung , Weng-Jin Wu , Jean Wang , Wen-Chih Chiou
- 申请人地址： TW Hsin-Chu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址： TW Hsin-Chu
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; B29C65/00
摘要：
The present disclosure provides a bonding apparatus. The bonding apparatus includes a cleaning module designed for cleaning chips; and a chip-to-wafer bonding chamber configured to receive the chips from the cleaning module and designed for bonding the chips to a wafer.
公开/授权文献
- US08387674B2 Chip on wafer bonder 公开/授权日：2013-03-05