End Point Detection in Grinding
    7.
    发明申请
    End Point Detection in Grinding 有权
    研磨中的终点检测

    公开(公告)号:US20130115854A1

    公开(公告)日:2013-05-09

    申请号:US13290879

    申请日:2011-11-07

    IPC分类号: B24B49/10

    摘要: A method for performing grinding includes selecting a target wheel loading for wafer grinding processes, and performing a grinding process on a wafer. With the proceeding of the grinding process, wheel loadings of the grinding process are measured. The grinding process is stopped after the target wheel loading is reached. The method alternatively includes selecting a target reflectivity of wafer grinding processes, and performing a grinding process on a wafer. With a proceeding of the grinding process, reflectivities of a light reflected from a surface of the wafer are measured. The grinding process is stopped after one of the reflectivities reaches the target reflectivity.

    摘要翻译: 执行磨削的方法包括:选择用于晶片研磨工艺的目标轮加载,以及对晶片进行研磨处理。 随着研磨过程的进行,测量研磨过程的轮载荷。 在达到目标轮加载后停止研磨过程。 该方法或者包括选择晶片研磨过程的目标反射率,以及对晶片进行研磨处理。 随着研磨过程的进行,测量从晶片表面反射的光的反射率。 在一个反射率达到目标反射率之后停止研磨过程。

    APPARATUS FOR STORING SUBSTRATES
    8.
    发明申请
    APPARATUS FOR STORING SUBSTRATES 有权
    储存基材的装置

    公开(公告)号:US20080295412A1

    公开(公告)日:2008-12-04

    申请号:US11755508

    申请日:2007-05-30

    IPC分类号: E06B7/16 H01L21/00

    摘要: An apparatus includes an enclosure and a door configured to seal the enclosure. The door includes a plate. A rotational apparatus is disposed over the plate. At least one first member with a first arm extends from a first rib of the first member. At least one second member with a second arm extends from a second rib of the second member. The first and second arms are connected to the rotational apparatus. At least one corner member has a first edge. The first edge has a shape corresponding to a shape of a corner of the frame. The corner member is connected to a first end of the third arm. A second end of the third arm is connected to the rotational apparatus. A sealing material is disposed along a first longitudinal side of the first rib and a second longitudinal side of the second rib.

    摘要翻译: 一种装置包括外壳和构造成密封外壳的门。 门包括一个板。 旋转装置设置在板上。 具有第一臂的至少一个第一构件从第一构件的第一肋延伸。 具有第二臂的至少一个第二构件从第二构件的第二肋延伸。 第一和第二臂连接到旋转装置。 至少一个角部件具有第一边缘。 第一边缘具有与框架的角部的形状对应的形状。 角部件连接到第三臂的第一端。 第三臂的第二端连接到旋转装置。 密封材料沿着第一肋的第一纵向侧面和第二肋的第二纵向侧面设置。

    Flash lamp annealing device
    9.
    发明申请
    Flash lamp annealing device 有权
    闪光灯退火装置

    公开(公告)号:US20070235662A1

    公开(公告)日:2007-10-11

    申请号:US11391563

    申请日:2006-03-29

    IPC分类号: G01N21/00

    摘要: A flash lamp annealing device comprises a heater plate, a loader, a lamp set and a control circuit. The heater plate heats a wafer to a predetermined temperature. The wafer is loaded on the loader disposed on the heater plate. The lamp set has one or a plurality of lamps to provide the wafer with a power. The control circuit is coupled to the lamp set to control the flash time of the lamp set.

    摘要翻译: 闪光灯退火装置包括加热板,装载器,灯组和控制电路。 加热板将晶片加热至预定温度。 将晶片装载在设置在加热板上的装载机上。 灯组具有一个或多个灯以提供晶片的功率。 控制电路耦合到灯组以控制灯组的闪光时间。