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公开(公告)号:US09691706B2
公开(公告)日:2017-06-27
申请号:US13452140
申请日:2012-04-20
申请人: Chen-Hua Yu , Jing-Cheng Lin , Jui-Pin Hung
发明人: Chen-Hua Yu , Jing-Cheng Lin , Jui-Pin Hung
IPC分类号: H01L23/48 , H01L23/538 , H01L23/00 , H01L21/56 , H01L23/498 , H01L23/544 , H01L21/683 , H01L23/31
CPC分类号: H01L25/0655 , H01L21/31053 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/6836 , H01L21/78 , H01L23/3128 , H01L23/49816 , H01L23/5386 , H01L23/5389 , H01L23/544 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/19 , H01L24/20 , H01L24/24 , H01L24/742 , H01L24/82 , H01L24/92 , H01L24/94 , H01L24/96 , H01L25/50 , H01L2221/68327 , H01L2221/68331 , H01L2223/54426 , H01L2224/02311 , H01L2224/0401 , H01L2224/05124 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/11002 , H01L2224/11334 , H01L2224/1134 , H01L2224/1184 , H01L2224/12105 , H01L2224/13022 , H01L2224/13023 , H01L2224/13024 , H01L2224/131 , H01L2224/13144 , H01L2224/13147 , H01L2224/2101 , H01L2224/211 , H01L2224/214 , H01L2224/215 , H01L2224/24011 , H01L2224/24101 , H01L2224/24137 , H01L2224/244 , H01L2224/24991 , H01L2224/82005 , H01L2224/82106 , H01L2224/8213 , H01L2224/82132 , H01L2224/92 , H01L2224/94 , H01L2924/181 , H01L2924/18162 , H01L2924/00014 , H01L2924/014 , H01L2924/00012 , H01L2224/82 , H01L2224/11 , H01L2224/19 , H01L2924/00
摘要: A package includes a die having a conductive pad at a top surface of the die, a stud bump over and connected to the conductive pad, and a redistribution line over and connected to the stud bump. An electrical connector is over and electrically coupled to the redistribution line.
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公开(公告)号:US09662812B2
公开(公告)日:2017-05-30
申请号:US13485307
申请日:2012-05-31
申请人: Chih-Hao Chen , Hsien-Wen Liu , Yi-Lin Tsai , Jui-Pin Hung , Jing-Cheng Lin
发明人: Chih-Hao Chen , Hsien-Wen Liu , Yi-Lin Tsai , Jui-Pin Hung , Jing-Cheng Lin
CPC分类号: B29C43/18 , H01L21/565 , H01L23/3121 , H01L24/16 , H01L24/32 , H01L24/73 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/94 , H01L2924/1531 , H01L2924/157 , H01L2924/00012 , H01L2224/81
摘要: A method includes molding a polymer onto a package component. The step of molding includes a first molding stage performed at a first temperature, and a second molding stage performed at a second temperature different from the first temperature.
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公开(公告)号:US09117682B2
公开(公告)日:2015-08-25
申请号:US13270850
申请日:2011-10-11
申请人: Jing-Cheng Lin , Jui-Pin Hung , Yi-Hang Lin , Tsan-Hua Tung
发明人: Jing-Cheng Lin , Jui-Pin Hung , Yi-Hang Lin , Tsan-Hua Tung
IPC分类号: H01L23/48 , H01L23/00 , H01L23/538 , H01L23/498
CPC分类号: H01L21/78 , H01L21/31051 , H01L21/561 , H01L21/565 , H01L23/293 , H01L23/3114 , H01L23/3135 , H01L23/49816 , H01L23/5386 , H01L23/5389 , H01L24/03 , H01L24/05 , H01L24/08 , H01L24/09 , H01L24/11 , H01L24/13 , H01L24/17 , H01L24/19 , H01L24/96 , H01L25/0652 , H01L25/50 , H01L2224/0231 , H01L2224/0237 , H01L2224/02379 , H01L2224/03002 , H01L2224/0401 , H01L2224/04105 , H01L2224/05008 , H01L2224/05552 , H01L2224/05569 , H01L2224/05571 , H01L2224/11002 , H01L2224/12105 , H01L2224/13024 , H01L2224/131 , H01L2224/96 , H01L2924/00012 , H01L2924/00014 , H01L2924/014 , H01L2924/07025 , H01L2924/12042 , H01L2924/181 , H01L2924/18162 , H01L2224/03 , H01L2224/11 , H01L2924/00
摘要: Methods of packaging semiconductor devices and structures thereof are disclosed. In one embodiment, a method of packaging a semiconductor device includes providing a carrier wafer, providing a plurality of dies, and forming a die cave material over the carrier wafer. A plurality of die caves is formed in the die cave material. At least one of the plurality of dies is placed within each of the plurality of die caves in the die cave material. A plurality of packages is formed, each of the plurality of packages being formed over a respective at least one of the plurality of dies.
摘要翻译: 公开了封装半导体器件的方法及其结构。 在一个实施例中,一种封装半导体器件的方法包括提供载体晶片,提供多个管芯,以及在载体晶片上形成管芯洞穴材料。 在模具洞穴材料中形成多个模具洞穴。 将多个模具中的至少一个放置在模具洞穴材料中的多个模具洞穴的每一个中。 形成多个封装,所述多个封装中的每个封装形成在所述多个管芯中的相应的至少一个管芯上。
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公开(公告)号:US08772929B2
公开(公告)日:2014-07-08
申请号:US13297992
申请日:2011-11-16
申请人: Chih-Hao Chen , Long Hua Lee , Chun-Hsing Su , Yi-Lin Tsai , Kung-Chen Yeh , Chung Yu Wang , Jui-Pin Hung , Jing-Cheng Lin
发明人: Chih-Hao Chen , Long Hua Lee , Chun-Hsing Su , Yi-Lin Tsai , Kung-Chen Yeh , Chung Yu Wang , Jui-Pin Hung , Jing-Cheng Lin
CPC分类号: H01L21/563 , H01L21/561 , H01L21/78 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/81 , H01L24/94 , H01L24/97 , H01L25/0652 , H01L25/0657 , H01L25/50 , H01L29/0657 , H01L2224/131 , H01L2224/16225 , H01L2224/17181 , H01L2224/26145 , H01L2224/2919 , H01L2224/32145 , H01L2224/73204 , H01L2224/81193 , H01L2224/81815 , H01L2224/83104 , H01L2224/9202 , H01L2224/92125 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2924/12042 , H01L2924/15311 , H01L2924/181 , H01L2924/18161 , H01L2924/351 , H01L2224/81 , H01L2224/32225 , H01L2924/00 , H01L2924/00014 , H01L2224/11 , H01L2924/014 , H01L2924/0665
摘要: A wafer level package includes a semiconductor die bonded on a supporting wafer. The semiconductor die has at least a step recess at its substrate. An underfill layer is formed between the semiconductor die and the supporting wafer. Moreover, the height of the underfill layer is limited by the step recess. During a fabrication process of the wafer level package, the step recess helps to reduce the stress on the wafer level package.
摘要翻译: 晶片级封装包括结合在支撑晶片上的半导体管芯。 半导体管芯在其衬底上至少有一个台阶凹槽。 在半导体管芯和支撑晶片之间形成底部填充层。 此外,底部填充层的高度受到台阶凹槽的限制。 在晶片级封装的制造过程中,台阶凹槽有助于减小晶片级封装上的应力。
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公开(公告)号:US08703542B2
公开(公告)日:2014-04-22
申请号:US13539229
申请日:2012-06-29
申请人: Jing-Cheng Lin , Jui-Pin Hung
发明人: Jing-Cheng Lin , Jui-Pin Hung
IPC分类号: H01L21/50
CPC分类号: H01L24/10 , H01L21/568 , H01L23/49816 , H01L23/49822 , H01L23/5389 , H01L24/19 , H01L24/20 , H01L24/24 , H01L24/82 , H01L2224/0401 , H01L2224/04105 , H01L2224/12105 , H01L2224/131 , H01L2224/13147 , H01L2224/24137 , H01L2224/82001 , H01L2924/181 , H01L2924/18162 , H01L2924/014 , H01L2924/00
摘要: The embodiments of mechanisms of wafer-level packaging (WLP) described above utilize a planarization stop layer to determine an end-point of the removal of excess molding compound prior to formation of redistribution lines (RDLs). Such mechanisms of WLP are used to implement fan-out and multi-chip packaging. The mechanisms are also usable to manufacture a package including chips (or dies) with different types of external connections. For example, a die with pre-formed bumps can be packaged with a die without pre-formed bumps.
摘要翻译: 上述晶片级封装(WLP)的机理的实施例利用平坦化停止层来确定形成再分配线(RDL)之前除去过量模塑料的终点。 WLP的这种机制被用于实现扇出和多芯片封装。 这些机构还可用于制造包括具有不同类型的外部连接的芯片(或模具)的包装。 例如,具有预先形成的凸块的模具可以与模具封装而没有预先形成的凸块。
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公开(公告)号:US20130119552A1
公开(公告)日:2013-05-16
申请号:US13298126
申请日:2011-11-16
申请人: Jing-Cheng Lin , Cheng-Lin Huang , Szu Wei Lu , Jui-Pin Hung , Shin-Puu Jeng , Chen-Hua Yu
发明人: Jing-Cheng Lin , Cheng-Lin Huang , Szu Wei Lu , Jui-Pin Hung , Shin-Puu Jeng , Chen-Hua Yu
IPC分类号: H01L23/538 , H01L21/56
CPC分类号: H01L21/561 , H01L21/568 , H01L23/16 , H01L23/3128 , H01L23/481 , H01L23/562 , H01L24/94 , H01L24/97 , H01L25/0652 , H01L25/50 , H01L2224/14181 , H01L2224/16145 , H01L2224/16146 , H01L2224/94 , H01L2225/06513 , H01L2225/06541 , H01L2225/06586 , H01L2225/06593 , H01L2924/10253 , H01L2924/15311 , H01L2924/181 , H01L2924/18161 , H01L2224/81 , H01L2924/00
摘要: A device includes a bottom chip and an active top die bonded to the bottom chip. A dummy die is attached to the bottom chip. The dummy die is electrically insulated from the bottom chip.
摘要翻译: 一种器件包括底部芯片和结合到底部芯片的有源顶部管芯。 虚设裸片连接到底部芯片。 虚设裸片与底部芯片电绝缘。
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公开(公告)号:US20130115854A1
公开(公告)日:2013-05-09
申请号:US13290879
申请日:2011-11-07
申请人: Yi-Chao Mao , Jui-Pin Hung , Jing-Cheng Lin , Shin-Puu Jeng , Chen-Hua Yu
发明人: Yi-Chao Mao , Jui-Pin Hung , Jing-Cheng Lin , Shin-Puu Jeng , Chen-Hua Yu
IPC分类号: B24B49/10
CPC分类号: H01L22/26 , B24B7/228 , B24B37/013 , B24B49/10 , H01L22/12 , H01L23/3114 , H01L2924/0002 , H01L2924/00
摘要: A method for performing grinding includes selecting a target wheel loading for wafer grinding processes, and performing a grinding process on a wafer. With the proceeding of the grinding process, wheel loadings of the grinding process are measured. The grinding process is stopped after the target wheel loading is reached. The method alternatively includes selecting a target reflectivity of wafer grinding processes, and performing a grinding process on a wafer. With a proceeding of the grinding process, reflectivities of a light reflected from a surface of the wafer are measured. The grinding process is stopped after one of the reflectivities reaches the target reflectivity.
摘要翻译: 执行磨削的方法包括:选择用于晶片研磨工艺的目标轮加载,以及对晶片进行研磨处理。 随着研磨过程的进行,测量研磨过程的轮载荷。 在达到目标轮加载后停止研磨过程。 该方法或者包括选择晶片研磨过程的目标反射率,以及对晶片进行研磨处理。 随着研磨过程的进行,测量从晶片表面反射的光的反射率。 在一个反射率达到目标反射率之后停止研磨过程。
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公开(公告)号:US20080295412A1
公开(公告)日:2008-12-04
申请号:US11755508
申请日:2007-05-30
申请人: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Jui-Pin Hung , Ming-Shih Yeh
发明人: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Jui-Pin Hung , Ming-Shih Yeh
CPC分类号: H01L21/67373 , H01L21/67376 , H01L21/67389
摘要: An apparatus includes an enclosure and a door configured to seal the enclosure. The door includes a plate. A rotational apparatus is disposed over the plate. At least one first member with a first arm extends from a first rib of the first member. At least one second member with a second arm extends from a second rib of the second member. The first and second arms are connected to the rotational apparatus. At least one corner member has a first edge. The first edge has a shape corresponding to a shape of a corner of the frame. The corner member is connected to a first end of the third arm. A second end of the third arm is connected to the rotational apparatus. A sealing material is disposed along a first longitudinal side of the first rib and a second longitudinal side of the second rib.
摘要翻译: 一种装置包括外壳和构造成密封外壳的门。 门包括一个板。 旋转装置设置在板上。 具有第一臂的至少一个第一构件从第一构件的第一肋延伸。 具有第二臂的至少一个第二构件从第二构件的第二肋延伸。 第一和第二臂连接到旋转装置。 至少一个角部件具有第一边缘。 第一边缘具有与框架的角部的形状对应的形状。 角部件连接到第三臂的第一端。 第三臂的第二端连接到旋转装置。 密封材料沿着第一肋的第一纵向侧面和第二肋的第二纵向侧面设置。
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公开(公告)号:US20070235662A1
公开(公告)日:2007-10-11
申请号:US11391563
申请日:2006-03-29
申请人: Fu-Kang Tien , Jui-Pin Hung
发明人: Fu-Kang Tien , Jui-Pin Hung
IPC分类号: G01N21/00
CPC分类号: H01L21/67115 , Y10T117/10 , Y10T117/1004 , Y10T117/1008
摘要: A flash lamp annealing device comprises a heater plate, a loader, a lamp set and a control circuit. The heater plate heats a wafer to a predetermined temperature. The wafer is loaded on the loader disposed on the heater plate. The lamp set has one or a plurality of lamps to provide the wafer with a power. The control circuit is coupled to the lamp set to control the flash time of the lamp set.
摘要翻译: 闪光灯退火装置包括加热板,装载器,灯组和控制电路。 加热板将晶片加热至预定温度。 将晶片装载在设置在加热板上的装载机上。 灯组具有一个或多个灯以提供晶片的功率。 控制电路耦合到灯组以控制灯组的闪光时间。
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公开(公告)号:US09064879B2
公开(公告)日:2015-06-23
申请号:US13228244
申请日:2011-09-08
申请人: Jui-Pin Hung , Jing-Cheng Lin , Nai-Wei Liu , Chin-Chuan Chang , Chen-Hua Yu , Shin-Puu Jeng , Chin-Fu Kao , Yi-Chao Mao , Szu Wei Lu
发明人: Jui-Pin Hung , Jing-Cheng Lin , Nai-Wei Liu , Chin-Chuan Chang , Chen-Hua Yu , Shin-Puu Jeng , Chin-Fu Kao , Yi-Chao Mao , Szu Wei Lu
IPC分类号: H01L21/44 , H01L21/48 , H01L21/50 , H01L23/48 , H01L23/52 , H01L29/40 , H01L21/56 , H01L23/14 , H01L23/498 , H01L23/538 , H01L21/683 , H01L23/31 , H01L23/00
CPC分类号: H01L21/561 , H01L21/568 , H01L21/6836 , H01L23/147 , H01L23/3114 , H01L23/49816 , H01L23/49827 , H01L23/5389 , H01L24/13 , H01L24/19 , H01L24/20 , H01L24/81 , H01L24/96 , H01L24/97 , H01L2221/68345 , H01L2221/68359 , H01L2221/68377 , H01L2224/0401 , H01L2224/05008 , H01L2224/05022 , H01L2224/05099 , H01L2224/05569 , H01L2224/05572 , H01L2224/05599 , H01L2224/11002 , H01L2224/12105 , H01L2224/13022 , H01L2224/16225 , H01L2224/16227 , H01L2224/73267 , H01L2224/83191 , H01L2224/96 , H01L2224/97 , H01L2924/00014 , H01L2924/12042 , H01L2924/181 , H01L2924/18161 , H01L2924/18162 , H01L2924/3511 , H01L2224/11 , H01L2224/81 , H01L2224/05552 , H01L2924/00
摘要: Packaging methods and structures for semiconductor devices that utilize a novel die attach film are disclosed. In one embodiment, a method of packaging a semiconductor device includes providing a carrier wafer and forming a die attach film (DAF) that includes a polymer over the carrier wafer. A plurality of dies is attached to the DAF, and the plurality of dies is packaged. At least the carrier wafer is removed from the packaged dies, and the packaged dies are singulated.
摘要翻译: 公开了利用新颖的芯片附着膜的半导体器件的封装方法和结构。 在一个实施例中,封装半导体器件的方法包括提供载体晶片并且在载体晶片上形成包括聚合物的管芯附着膜(DAF)。 多个模具附接到DAF,并且多个管芯被封装。 至少载体晶片从封装的管芯移除,并且封装的管芯被切割。
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