Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Patent Title (中): 半导体器件及其形成方法
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Application No.: US12130877Application Date: 2008-05-30
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Publication No.: US20090152673A1Publication Date: 2009-06-18
- Inventor: O-Kyun KWON , Dong-Woo SUH , Junghyung PYO , Gyung-Ock KIM
- Applicant: O-Kyun KWON , Dong-Woo SUH , Junghyung PYO , Gyung-Ock KIM
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2007-132314 20071217
- Main IPC: H01L23/482
- IPC: H01L23/482 ; H01L21/76

Abstract:
Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
Public/Granted literature
- US07790567B2 Semiconductor device and method for forming the same Public/Granted day:2010-09-07
Information query
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