发明申请
- 专利标题： MICRORESONATOR
- 专利标题（中）： 微型计算机
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申请号： US12266471申请日： 2008-11-06
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公开(公告)号： US20090152998A1公开(公告)日： 2009-06-18
- 发明人: Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
- 申请人： Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
- 申请人地址： FR Crolles FR Montrouge FR Paris
- 专利权人： STMicroelectronics (Crolles) 2 SAS,STMicroelectronics S.A.,Commissariat A L'energie Atomique
- 当前专利权人： STMicroelectronics (Crolles) 2 SAS,STMicroelectronics S.A.,Commissariat A L'energie Atomique
- 当前专利权人地址： FR Crolles FR Montrouge FR Paris
- 优先权： FR0550276 20050131
- 主分类号： H01L41/00
- IPC分类号： H01L41/00 ; H01L21/20
摘要：
A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
公开/授权文献
- US07858407B2 Microresonator 公开/授权日：2010-12-28